Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7262524 | Bearing assembly, stage device using same, and exposure apparatus using same | — | 2007-08-28 |
| 7084538 | Bearing assembly, stage device using same, and exposure apparatus using same | — | 2006-08-01 |
| 6965426 | Positioning system and exposure apparatus having the same | — | 2005-11-15 |
| 6583859 | Stage device, an exposure apparatus and a device manufacturing method using the same | Yoshikazu Miyajima, Yukio Takabayashi | 2003-06-24 |
| 6266133 | Stage device, an exposure apparatus and a device manufacturing method using the same | Yoshikazu Miyajima, Yukio Takabayashi | 2001-07-24 |
| 6151100 | Positioning system | Yukio Yamane | 2000-11-21 |
| 5825545 | Image stabilizing device | Yoshiki Kino, Naoya Kaneda, Kazuya Matsuda, Youichi Iwasaki, Hiroyuki Wada +1 more | 1998-10-20 |
| 5596366 | Camera apparatus having camera movement detection | Shigeru Ogino | 1997-01-21 |
| 5483376 | Optical apparatus | — | 1996-01-09 |