Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7119878 | Exposure apparatus and method of cleaning optical element of the same | Tomoharu Hase | 2006-10-10 |
| 7061576 | Exposure apparatus and method of cleaning optical element of the same | Tomoharu Hase | 2006-06-13 |
| 6762822 | Exposure apparatus and manufacturing method using the same | Yoshinori Miwa | 2004-07-13 |
| 6590631 | Exposure apparatus and device manufacturing method using the same | Yoshinori Miwa | 2003-07-08 |
| 6552774 | Exposure apparatus | Tomoharu Hase, Yoshinori Miwa | 2003-04-22 |
| 6259509 | Exposure apparatus and device manufacturing method | Yoshinori Miwa | 2001-07-10 |
| 6252648 | Exposure apparatus and method of cleaning optical element of the same | Tomoharu Hase | 2001-06-26 |
| 6151100 | Positioning system | Tsuneo Takashima | 2000-11-21 |
| 5858587 | Positioning system and method and apparatus for device manufacture | Eiji Osanai, Kotaro Akutsu | 1999-01-12 |
| 5773953 | Substrate transfer system | Takao Ukaji | 1998-06-30 |
| 5523843 | Position detecting system | Kazuya Ono | 1996-06-04 |
| 5440397 | Apparatus and method for exposure | Kazuya Ono | 1995-08-08 |
| 5102188 | Vehicle body structure producing method and flowable resin damming arrangement therefor | — | 1992-04-07 |
| 4869481 | Plate-like article holding device | Shuichi Yabu, Kazuo Takahashi | 1989-09-26 |
| 4434593 | Window structure of a vehicle body | Masayoshi Horike, Haruo Yamamoto, Kazuhiko Yoshiyuki, Toshiaki Endo | 1984-03-06 |
| 4405174 | Window structure of a vehicle body | Kazuhiko Yoshiyuki, Toshiaki Endo | 1983-09-20 |
| 4261610 | Molding assembly | Hiroshi Inamoto | 1981-04-14 |