Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7251014 | Exposing method, exposing apparatus and device manufacturing method utilizing them | — | 2007-07-31 |
| 7236239 | Illumination system and exposure apparatus | — | 2007-06-26 |
| 7119878 | Exposure apparatus and method of cleaning optical element of the same | Yukio Yamane | 2006-10-10 |
| 7116397 | Exposure apparatus and device manufacturing method | — | 2006-10-03 |
| 7061576 | Exposure apparatus and method of cleaning optical element of the same | Yukio Yamane | 2006-06-13 |
| 6999159 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | — | 2006-02-14 |
| 6967706 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | — | 2005-11-22 |
| 6853439 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | — | 2005-02-08 |
| 6630985 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | — | 2003-10-07 |
| 6552774 | Exposure apparatus | Yukio Yamane, Yoshinori Miwa | 2003-04-22 |
| 6252648 | Exposure apparatus and method of cleaning optical element of the same | Yukio Yamane | 2001-06-26 |