Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7586582 | Exposure apparatus | Hideki Ina, Koichi Sentoku, Gaku Takahashi | 2009-09-08 |
| 7435984 | Imaging optical system and exposure apparatus | Koichi Sentoku, Gaku Takahashi, Hideki Ina | 2008-10-14 |
| 7265812 | Cooling apparatus | Shinichi Hara, Eiji Sakamoto, Yasuo Hasegawa, Yoshiki Kino | 2007-09-04 |
| 7145632 | Cooling apparatus | Shinichi Hara, Eiji Sakamoto, Yasuo Hasegawa, Yoshiki Kino | 2006-12-05 |
| 7095480 | Cooling apparatus | Shinichi Hara, Eiji Sakamoto, Yasuo Hasegawa, Yoshiki Kino | 2006-08-22 |
| 7009684 | Exposure apparatus and exposure method | — | 2006-03-07 |
| 6982841 | Mirror holding mechanism in exposure apparatus, and device manufacturing method | Yoshiki Kino, Masanori Honda | 2006-01-03 |
| 6829034 | Exposure apparatus and device manufacturing method | Eiji Sakamoto | 2004-12-07 |
| 6829038 | Exposure apparatus and exposure method | — | 2004-12-07 |
| 6791662 | Exposure method and apparatus, and device manufacturing method | — | 2004-09-14 |
| 6762822 | Exposure apparatus and manufacturing method using the same | Yukio Yamane | 2004-07-13 |
| 6590631 | Exposure apparatus and device manufacturing method using the same | Yukio Yamane | 2003-07-08 |
| 6552774 | Exposure apparatus | Tomoharu Hase, Yukio Yamane | 2003-04-22 |
| 6522384 | Exposure method and apparatus, and device manufacturing method | — | 2003-02-18 |
| 6493066 | Exposure apparatus | — | 2002-12-10 |
| 6278516 | Projection exposure apparatus and method of producing a device using a projection exposure apparatus | Tetsumi Yamana | 2001-08-21 |
| 6259509 | Exposure apparatus and device manufacturing method | Yukio Yamane | 2001-07-10 |