Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11696026 | Control apparatus and method, and storage medium | Kazuya Higuma, Yasuhiro Hatakeyama | 2023-07-04 |
| 8623765 | Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus | Jun Ozawa | 2014-01-07 |
| 7586582 | Exposure apparatus | Hideki Ina, Koichi Sentoku, Yoshinori Miwa | 2009-09-08 |
| 7435984 | Imaging optical system and exposure apparatus | Koichi Sentoku, Hideki Ina, Yoshinori Miwa | 2008-10-14 |