Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7391496 | Exposure apparatus | Keiji Emoto, Hirohide Matsuhisa | 2008-06-24 |
| 7207720 | Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method | Choshoku Sai | 2007-04-24 |
| 7123350 | Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate | Mitsuru Inoue | 2006-10-17 |
| 7057703 | Exposure apparatus | Keiji Emoto, Hirohide Matsuhisa | 2006-06-06 |
| 7057193 | Exposure apparatus | — | 2006-06-06 |
| 7038759 | Exposure apparatus | Keiji Emoto, Hirohide Matsuhisa | 2006-05-02 |
| 7030964 | Stage system, exposure apparatus, and device manufacturing method | Nobushige Korenaga, Mitsuru Inoue | 2006-04-18 |
| 7012690 | Substrate processing apparatus | Keiji Emoto | 2006-03-14 |
| 6989888 | Stage system, exposure apparatus, and device manufacturing method | — | 2006-01-24 |
| 6930756 | Electron beam exposure apparatus and semiconductor device manufacturing method | Shin Matsui | 2005-08-16 |
| 6879382 | Substrate processing apparatus | Keiji Emoto | 2005-04-12 |
| 6359679 | Positioning device, exposure device, and device manufacturing method | Hirohito Ito | 2002-03-19 |
| 6285444 | Positioning system and position measuring method for use in exposure apparatus | Eiji Osanai | 2001-09-04 |
| 6028376 | Positioning apparatus and exposure apparatus using the same | Eiji Osanai, Hirohito Ito | 2000-02-22 |
| 6008882 | Stage device, method of controlling same, and exposure apparatus using said stage device | Hirohito Ito | 1999-12-28 |
| 5939852 | Stage feeding device | Eiji Osanai, Hirohito Ito | 1999-08-17 |
| 5864389 | Stage apparatus and exposure apparatus and device producing method using the same | Eiji Osanai | 1999-01-26 |
| 5858587 | Positioning system and method and apparatus for device manufacture | Yukio Yamane, Eiji Osanai | 1999-01-12 |
| 5726548 | Moving stage apparatus and system using the same | Shinichi Chiba | 1998-03-10 |
| 5701041 | Weight supporting apparatus | Eiji Osanai, Shigeto Kamata | 1997-12-23 |
| 5585627 | Apparatus for scanning original image having a plurality of mirrors of different natural frequencies | Atsushi Takasaki | 1996-12-17 |
| 5382095 | Static pressure bearing device | — | 1995-01-17 |
| 5184055 | Device for positioning control | Shinji Ohishi, Toshikazu Sakai | 1993-02-02 |