| 7566422 |
Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus |
Shinichi Hara, Yutaka Tanaka, Shigeru Terashima, Takayuki Hasegawa |
2009-07-28 |
| 7218383 |
Holding system, exposure apparatus, and device manufacturing method |
— |
2007-05-15 |
| 7187432 |
Holding system, exposure apparatus, and device manufacturing method |
— |
2007-03-06 |
| 7102735 |
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method |
— |
2006-09-05 |
| 6984362 |
Processing apparatus, measuring apparatus, and device manufacturing method |
Shinichi Hara, Yutaka Tanaka, Shigeru Terashima, Takayuki Hasegawa |
2006-01-10 |
| 6982784 |
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method |
— |
2006-01-03 |
| 6930756 |
Electron beam exposure apparatus and semiconductor device manufacturing method |
Kotaro Akutsu |
2005-08-16 |
| 6862080 |
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method |
— |
2005-03-01 |
| 6616898 |
Processing apparatus with pressure control and gas recirculation system |
Shinichi Hara, Yutaka Tanaka, Shigeru Terashima, Takayuki Hasegawa |
2003-09-09 |
| 6408045 |
Stage system and exposure apparatus with the same |
Shinji Ohishi, Eiji Osanai, Tadayuki Kubo |
2002-06-18 |
| 6404505 |
Positioning stage system and position measuring method |
— |
2002-06-11 |
| 6225637 |
Electron beam exposure apparatus |
Shigeru Terashima, Masato Muraki, Masahiko Okunuki, Akira Miyake |
2001-05-01 |
| 6054713 |
Electron beam exposure apparatus |
Akira Miyake, Masato Muraki, Masahiko Okunuki, Shigeru Terashima |
2000-04-25 |
| 5999589 |
Substrate holding device and exposing apparatus using the same |
Yuji Chiba, Nobutoshi Mizusawa, Kazunori Iwamoto, Yutaka Tanaka, Shinichi Hara +2 more |
1999-12-07 |
| 5930324 |
Exposure apparatus and device manufacturing method using the same |
Ryuichi Ebinuma, Yuji Chiba, Yutaka Tanaka |
1999-07-27 |
| 5883932 |
Substrate holding device and exposing apparatus using the same |
Yuji Chiba, Nobutoshi Mizusawa, Kazunori Iwamoto, Yutaka Tanaka, Shinichi Hara +2 more |
1999-03-16 |
| 5277539 |
Substrate conveying apparatus |
Takao Kariya, Nobutoshi Mizusawa, Ryuichi Ebinuma, Shunichi Uzawa |
1994-01-11 |
