Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11246492 | Apparatus performing examination utilizing photoacoustic effect, examination support method, and program | — | 2022-02-15 |
| 11058357 | Acoustic wave apparatus and control method thereof | — | 2021-07-13 |
| 9874912 | Controlling energizing range of mobile electronic device | Yoshihiro Takase, Yasumichi Tsukamoto, Yuichiro Seto | 2018-01-23 |
| 8729493 | Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus | — | 2014-05-20 |
| 8686374 | Drawing apparatus, and method of manufacturing article | — | 2014-04-01 |
| 8618497 | Drawing apparatus, method of manufacturing article, and information processing apparatus | Tomoyuki Morita | 2013-12-31 |
| 7982417 | Stage unit, exposure apparatus, and device manufacturing method | — | 2011-07-19 |
| 7746786 | Retransmission control method and device | Yuichiro Oishi | 2010-06-29 |
| 7635930 | Stage apparatus | — | 2009-12-22 |
| 7259836 | Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider | — | 2007-08-21 |
| 7245092 | Alignment stage apparatus, exposure apparatus, and semiconductor device manufacturing method | — | 2007-07-17 |
| 7199493 | Alignment stage apparatus | — | 2007-04-03 |
| 7171569 | Apparatus, method and program product for preventing system mode change by mistaken instruction | Akiyoshi Tanaka, Noritoshi Yoshiyama | 2007-01-30 |
| 7088429 | Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider | — | 2006-08-08 |
| 7084534 | Alignment stage apparatus | — | 2006-08-01 |
| 6504160 | Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device | Hirohito Itoh | 2003-01-07 |
| 6408045 | Stage system and exposure apparatus with the same | Shin Matsui, Eiji Osanai, Tadayuki Kubo | 2002-06-18 |
| 6072183 | Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device | Hirohito Itoh | 2000-06-06 |
| 5727182 | Method and apparatus for adjusting output current values for expansion memories | Toshiaki Fukushima, Masahiko Nomura | 1998-03-10 |
| 5684856 | Stage device and pattern transfer system using the same | Hirohito Itoh, Kazunori Iwamoto, Nobushige Korenaga, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
| 5666038 | Positioning table device including correction of energization electric current to selected coils of a permanent magnet of a drive device | — | 1997-09-09 |
| 5260580 | Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device | Hirohito Itoh | 1993-11-09 |
| 5184055 | Device for positioning control | Kotaro Akutsu, Toshikazu Sakai | 1993-02-02 |
| 4810941 | Control system for a servomotor | Makoto Higomura | 1989-03-07 |