Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10810340 | Semiconductor chip designing method, non-transitory storage medium storing semiconductor chip designing program, semiconductor device production method, and arithmetic device | — | 2020-10-20 |
| 9310695 | Exposure apparatus, method of obtaining amount of regulation of object to be regulated, program, and method of manufacturing article | Yoshimi Takano, Satoshi Kubo | 2016-04-12 |
| 8811714 | Method, apparatus and medium for determining the intensity distribution formed on a pupil plane of an illumination optical system | Yuichi Gyoda, Hiroyuki Ishii, Koji Mikami | 2014-08-19 |
| 8493551 | Scanning exposure apparatus, control apparatus and method of manufacturing device | Mitsuo Hirata | 2013-07-23 |
| 8450031 | Determination method, exposure method and storage medium | Yuichi Gyoda, Hiroyuki Ishii, Yuji Shinano | 2013-05-28 |
| 7894039 | Exposure apparatus and method, and device manufacturing method | Ryuhei Miyashiro | 2011-02-22 |
| 7346886 | Method and apparatus for determining chip arrangement position on substrate | Mario Nakamori | 2008-03-18 |
| 7301615 | Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method | Toshiyuki Yoshihara, Mario Nakamori, Yuji Shinano | 2007-11-27 |
| 7230692 | Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method | Toshiyuki Yoshihara, Mario Nakamori, Yuji Shinano | 2007-06-12 |
| 7084957 | Scanning exposure technique | — | 2006-08-01 |
| 6947119 | Distortion measurement method and exposure apparatus | — | 2005-09-20 |
| 6854105 | Chip arrangement determining apparatus and method | — | 2005-02-08 |
| 6081319 | Illumination system and scan type exposure apparatus | Kunitaka Ozawa, Eiji Sakamoto, Kazuhiro Takahashi | 2000-06-27 |
| 5878068 | Energy quantity control method | Reiji Mitarai | 1999-03-02 |
| 5684856 | Stage device and pattern transfer system using the same | Hirohito Itoh, Shinji Ohishi, Kazunori Iwamoto, Nobushige Korenaga, Toshiya Asano +1 more | 1997-11-04 |