Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6504160 | Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device | Shinji Ohishi | 2003-01-07 |
| 6072183 | Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device | Shinji Ohishi | 2000-06-06 |
| 5684856 | Stage device and pattern transfer system using the same | Shinji Ohishi, Kazunori Iwamoto, Nobushige Korenaga, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
| 5260580 | Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device | Shinji Ohishi | 1993-11-09 |
| 4854169 | Accelerometer | Kazuhiro Sakuma, Mitsuaki Kazou, Kenji Kuramoto | 1989-08-08 |