Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8244156 | Method for producing cleaning device and cleaning device | Naoki Koike, Yusuke Inoue | 2012-08-14 |
| 7346414 | Moving mechanism and stage system in exposure apparatus | Hideo Tanaka, Yukio Takabayashi | 2008-03-18 |
| 6990386 | Moving mechanism and stage system in exposure apparatus | Hideo Tanaka, Yukio Takabayashi | 2006-01-24 |
| 6965428 | Stage apparatus, exposure apparatus, and semiconductor device manufacturing method | Yasuyo Muto, Yukio Takabayashi, Takashi Meguro | 2005-11-15 |
| 6891599 | Stage apparatus and exposure apparatus | — | 2005-05-10 |
| 6867849 | STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE POSITION MEASUREMENT METHOD, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE APPARATUS MAINTENANCE METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING FACTORY | Toshiya Asano | 2005-03-15 |
| 6856404 | Scanning exposure method and apparatus, and device manufacturing method using the same | Nobuyoshi Deguchi | 2005-02-15 |
| 6819433 | Exposure apparatus including interferometer system | Ryo Takai | 2004-11-16 |
| 6717653 | Moving mechanism in exposure apparatus, and exposure apparatus having the same | Hideki Nogawa | 2004-04-06 |
| 6469773 | Stage apparatus, exposure apparatus and device manufacturing method | — | 2002-10-22 |
| 6133982 | Exposure apparatus | Mitsuru Inoue, Ryuichi Ebinuma, Hideki Nogawa | 2000-10-17 |
| 6069683 | Scanning exposure method and apparatus | — | 2000-05-30 |
| 6008885 | Scanning exposure apparatus | Kazuhiro Takahashi | 1999-12-28 |
| 5999589 | Substrate holding device and exposing apparatus using the same | Yuji Chiba, Nobutoshi Mizusawa, Yutaka Tanaka, Shinichi Hara, Mitsuji Marumo +2 more | 1999-12-07 |
| 5933215 | Exposure apparatus and device manufacturing method using the same | Mitsuru Inoue, Ryuichi Ebinuma, Eiji Osanai, Hiroaki Takeishi | 1999-08-03 |
| 5909272 | Stage and exposure apparatus using same | Eiji Osanai, Mitsuru Inoue, Katsumi Asada, Hiroshi Ito | 1999-06-01 |
| 5883932 | Substrate holding device and exposing apparatus using the same | Yuji Chiba, Nobutoshi Mizusawa, Yutaka Tanaka, Shinichi Hara, Mitsuji Marumo +2 more | 1999-03-16 |
| 5781277 | Projection exposure apparatus and exposure method and semiconductor device production method therewith | — | 1998-07-14 |
| 5687947 | Mounting method | Shunichi Uzawa, Takao Kariya, Ryuichi Ebinuma, Hiroshi Chiba, Shinkichi Ohkawa | 1997-11-18 |
| 5684856 | Stage device and pattern transfer system using the same | Hirohito Itoh, Shinji Ohishi, Nobushige Korenaga, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
| 5640440 | Substrate conveying system | Mitsutoshi Kuno, Mitsuji Marumo | 1997-06-17 |
| 5483343 | Wavelength compensator in a helium ambience | Kenji Saitoh, Hiroshi Osawa | 1996-01-09 |
| 5467720 | Support device | Nobushige Korenaga | 1995-11-21 |
| 5231291 | Wafer table and exposure apparatus with the same | Mitsuaki Amemiya, Eiji Sakamoto, Koji Uda, Kunitaka Ozawa, Shunichi Uzawa +1 more | 1993-07-27 |
| 5226523 | Conveying apparatus and method of controlling the same | Eigo Kawakami, Koji Uda, Kunitaka Ozawa, Shunichi Uzawa, Mitsutoshi Kuno +1 more | 1993-07-13 |