| 9123760 |
Processing apparatus and device manufacturing method |
Shinichi Hirano |
2015-09-01 |
| 8441614 |
Processing apparatus and device manufacturing method |
Shinichi Hirano |
2013-05-14 |
| 6800803 |
Semiconductor manufacturing method and apparatus |
— |
2004-10-05 |
| 5999589 |
Substrate holding device and exposing apparatus using the same |
Yuji Chiba, Nobutoshi Mizusawa, Kazunori Iwamoto, Yutaka Tanaka, Shinichi Hara +2 more |
1999-12-07 |
| 5883932 |
Substrate holding device and exposing apparatus using the same |
Yuji Chiba, Nobutoshi Mizusawa, Kazunori Iwamoto, Yutaka Tanaka, Shinichi Hara +2 more |
1999-03-16 |
| 5640440 |
Substrate conveying system |
Mitsutoshi Kuno, Kazunori Iwamoto |
1997-06-17 |
| 5586159 |
Substrate holding system and exposure apparatus having the same |
Atsushi Kitaoka, Mitsutoshi Kuno |
1996-12-17 |
| 5436693 |
Substrate holding apparatus and a system using the same |
— |
1995-07-25 |
| 5374829 |
Vacuum chuck |
Eiji Sakamoto, Ryuichi Ebinuma, Shinichi Hara |
1994-12-20 |
| 5231291 |
Wafer table and exposure apparatus with the same |
Mitsuaki Amemiya, Eiji Sakamoto, Koji Uda, Kunitaka Ozawa, Kazunori Iwamoto +1 more |
1993-07-27 |
| 5203547 |
Vacuum attraction type substrate holding device |
— |
1993-04-20 |
| 5191218 |
Vacuum chuck |
Tetsuzo Mori, Kazunori Iwamoto, Yuji Chiba, Kazuyuki Kasumi |
1993-03-02 |
| 5160961 |
Substrate holding device |
Kazunori Iwamoto, Nobutoshi Mizusawa, Takao Kariya, Shunichi Uzawa |
1992-11-03 |
