Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815253 | Light source device, cooling method, and manufacturing method for product | Takao Miura | 2023-11-14 |
| 10990005 | Method in which alignment control of a member and a substrate is effected with respect to an in-plane direction of the substrate and an uncured material in a state of bringing a member and the uncured material on a substrate into contact | Shingo Okushima, Nobuhito Suehira, Junichi Seki | 2021-04-27 |
| 10670961 | Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrate | Shingo Okushima, Nobuhito Suehira, Junichi Seki | 2020-06-02 |
| 9579843 | Imprint apparatus in which alignment control of a mold and a substrate is effected | Shingo Okushima, Nobuhito Suehira, Junichi Seki | 2017-02-28 |
| 9573319 | Imprinting method and process for producing a member in which a mold contacts a pattern forming layer | Shingo Okushima, Nobuhito Suehira, Junichi Seki | 2017-02-21 |
| 8973495 | Imprint apparatus, imprint method, and article manufacturing method | Hideki Ina | 2015-03-10 |
| 8951031 | Imprinting apparatus and article manufacturing method | — | 2015-02-10 |
| 8834144 | Imprinting machine and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Eigo Kawakami, Toshinobu Tokita | 2014-09-16 |
| 8616874 | Pattern transferring apparatus and pattern transferring method | Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Toshinobu Tokita | 2013-12-31 |
| 8564891 | Holding apparatus, optical apparatus, and telescope | Kouhei Imoto | 2013-10-22 |
| 8414279 | Imprint apparatus and article manufacturing method | Eigo Kawakami, Hideki Ina | 2013-04-09 |
| 8393885 | Processing apparatus | Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Toshinobu Tokita | 2013-03-12 |
| 8347915 | Load-lock technique | — | 2013-01-08 |
| 7846346 | Processing apparatus and method | Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Toshinobu Tokita | 2010-12-07 |
| 7815424 | Imprinting machine and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Eigo Kawakami, Toshinobu Tokita | 2010-10-19 |
| 7815425 | Processing apparatus | Toshinobu Tokita, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura | 2010-10-19 |
| 7807065 | Processing method | Toshinobu Tokita, Hirohisa Ota, Eigo Kawakami | 2010-10-05 |
| 7789647 | Processing apparatus and method | Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Toshinobu Tokita | 2010-09-07 |
| 7785091 | Processing apparatus and device manufacturing method | Eigo Kawakami | 2010-08-31 |
| 7690912 | Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same | Toshinobu Tokita, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura | 2010-04-06 |
| 7658601 | Pattern forming apparatus | — | 2010-02-09 |
| 7411655 | Load-lock technique | — | 2008-08-12 |
| 7381272 | Processing apparatus | Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Toshinobu Tokita | 2008-06-03 |
| 7248335 | Exposure apparatus, device manufacturing method, stage apparatus, and alignment method | — | 2007-07-24 |
| 7236231 | Exposure apparatus and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Eigo Kawakami, Toshinobu Tokita | 2007-06-26 |