Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9188854 | Transfer apparatus and method of manufacturing device | — | 2015-11-17 |
| 9039402 | Imprinting apparatus and method therefor | Shingo Okushima, Hideki Ina, Junichi Seki, Atsunori Terasaki, Motoki Okinaka | 2015-05-26 |
| 8834144 | Imprinting machine and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Kazuyuki Kasumi, Toshinobu Tokita | 2014-09-16 |
| 8770964 | Imprint apparatus and article manufacturing method | — | 2014-07-08 |
| 8734701 | Imprint apparatus and method of manufacturing article | — | 2014-05-27 |
| 8616874 | Pattern transferring apparatus and pattern transferring method | Kazuyuki Kasumi, Hirohisa Ota, Takashi Nakamura, Toshinobu Tokita | 2013-12-31 |
| 8414279 | Imprint apparatus and article manufacturing method | Kazuyuki Kasumi, Hideki Ina | 2013-04-09 |
| 8404169 | Imprint apparatus and method of manufacturing article | Hideki Ina, Junichi Seki, Atsunori Terasaki, Shingo Okushima, Motoki Okinaka | 2013-03-26 |
| 8393885 | Processing apparatus | Kazuyuki Kasumi, Hirohisa Ota, Takashi Nakamura, Toshinobu Tokita | 2013-03-12 |
| 8226392 | Transfer apparatus and method of manufacturing device | — | 2012-07-24 |
| 7846346 | Processing apparatus and method | Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi, Toshinobu Tokita | 2010-12-07 |
| 7815424 | Imprinting machine and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Kazuyuki Kasumi, Toshinobu Tokita | 2010-10-19 |
| 7815425 | Processing apparatus | Toshinobu Tokita, Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi | 2010-10-19 |
| 7807065 | Processing method | Toshinobu Tokita, Hirohisa Ota, Kazuyuki Kasumi | 2010-10-05 |
| 7789647 | Processing apparatus and method | Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi, Toshinobu Tokita | 2010-09-07 |
| 7785091 | Processing apparatus and device manufacturing method | Kazuyuki Kasumi | 2010-08-31 |
| 7719659 | Exposure apparatus and device manufacturing method | — | 2010-05-18 |
| 7690912 | Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same | Toshinobu Tokita, Hirohisa Ota, Kazuyuki Kasumi, Takashi Nakamura | 2010-04-06 |
| 7649184 | Processing method and system | — | 2010-01-19 |
| 7381272 | Processing apparatus | Kazuyuki Kasumi, Hirohisa Ota, Takashi Nakamura, Toshinobu Tokita | 2008-06-03 |
| 7382434 | Exposure apparatus and device manufacturing method | — | 2008-06-03 |
| 7236231 | Exposure apparatus and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Kazuyuki Kasumi, Toshinobu Tokita | 2007-06-26 |
| 7233383 | Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration | Toshinobu Tokita, Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi | 2007-06-19 |
| 7196321 | Fine pattern forming apparatus and fine pattern inspecting apparatus | Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi, Toshinobu Tokita | 2007-03-27 |
| 7180575 | Exposure apparatus and device manufacturing method | Kazuyuki Kasumi, Hirohisa Ota, Takashi Nakamura, Toshinobu Tokita | 2007-02-20 |