Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6990173 | Positioning apparatus, atmosphere substituting method, exposure apparatus, and device manufacturing method | Shinichi Hara | 2006-01-24 |
| 5994698 | Microprobe, preparation thereof and electronic device by use of said microprobe | Hisaaki Kawade, Haruki Kawada, Kunihiro Sakai, Hiroshi Matsuda, Yuko Morikawa +5 more | 1999-11-30 |
| 5721721 | Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium | Yoshihiro Yanagisawa, Yuko Morikawa, Hiroshi Matsuda, Haruki Kawada, Kunihiro Sakai +7 more | 1998-02-24 |
| 5641264 | Substrate conveying device and method of controlling the same | Mitsutoshi Kuno, Hidehiko Fujioka, Nobutoshi Mizusawa, Yuji Chiba, Takao Kariya +2 more | 1997-06-24 |
| 5519686 | Encoder for controlling measurements in the range of a few angstroms | Yoshihiro Yanagisawa, Yuko Morikawa, Hiroshi Matsuda, Haruki Kawada, Kunihiro Sakai +7 more | 1996-05-21 |
| 5482002 | Microprobe, preparation thereof and electronic device by use of said microprobe | Hisaaki Kawade, Haruki Kawada, Kunihiro Sakai, Hiroshi Matsuda, Yuko Morikawa +5 more | 1996-01-09 |
| 5443932 | Exposure method | Hirohisa Ohta, Kunitaka Ozawa, Shunichi Uzawa | 1995-08-22 |
| 5276725 | Exposure system | Minoru Yoshii, Shunichi Uzawa | 1994-01-04 |
| 5255258 | Microprobe, preparation thereof and electronic device by use of said microprobe | Hisaaki Kawade, Haruki Kawada, Kunihiro Sakai, Hiroshi Matsuda, Yuko Morikawa +5 more | 1993-10-19 |
| 5226523 | Conveying apparatus and method of controlling the same | Koji Uda, Kunitaka Ozawa, Shunichi Uzawa, Mitsutoshi Kuno, Kazunori Iwamoto +1 more | 1993-07-13 |
| 5157700 | Exposure apparatus for controlling intensity of exposure radiation | Hiroshi Kurosawa, Mitsuaki Amemiya, Shigeru Terashima, Koji Uda, Isamu Shimoda +6 more | 1992-10-20 |
| 5072116 | Microprobe preparation thereof and electronic device by use of said microprobe | Hisaaki Kawade, Haruki Kawada, Kunihiro Sakai, Hiroshi Matsuda, Yuko Morikawa +5 more | 1991-12-10 |
| 5008703 | Exposure apparatus and control of the same | Kunitaka Ozawa, Koji Uda, Isamu Shimoda, Shunichi Uzawa | 1991-04-16 |
| 4985186 | Process for producing optical element | Noriyuki Nose, Toshiyuki Nakajima, Takeshi Baba, Nobuo Kushibiki, Masakazu Matsugu +1 more | 1991-01-15 |
| 4971455 | Slider | Kazuya Matsumoto | 1990-11-20 |
| 4802746 | Variable-focus optical element and focus detecting device utilizing the same | Takeshi Baba, Shigeyuki Suda, Noriyuki Nose, Toshiyuki Nakajima, Nobuo Kushibiki | 1989-02-07 |
| 4788596 | Image stabilizing device | Yukichi Niwa, Mitsutoshi Ohwada, Yasuo Ogino, Minoru Yoshii, Shigeyuki Suda | 1988-11-29 |
| 4780739 | Anti-vibration imaging device | Yukichi Niwa, Yasuo Ogino, Minoru Yoshii, Shigeyuki Suda, Mitsutoshi Ohwada | 1988-10-25 |
| 4685766 | Optical device | Yukuo Nishimura, Toshiaki Asano, Masahiro Haruta, Hiroshi Takagi, Takashi Noma +3 more | 1987-08-11 |
| 4667316 | Information recording-reproducing apparatus | Shigeyuki Suda, Yukichi Niwa, Yasuo Ogino, Mitsutoshi Ohwada | 1987-05-19 |
| 4640592 | Optical display utilizing thermally formed bubble in a liquid core waveguide | Yukuo Nishimura, Toshiaki Asano, Nobutoshi Mizusawa, Masahiro Haruta, Takashi Noma +3 more | 1987-02-03 |