| 5641264 |
Substrate conveying device and method of controlling the same |
Mitsutoshi Kuno, Hidehiko Fujioka, Nobutoshi Mizusawa, Yuji Chiba, Takao Kariya +2 more |
1997-06-24 |
| 5610965 |
Exposure method |
Makiko Mori, Kunitaka Ozawa, Isamu Shimoda, Shunichi Uzawa, Eiji Sakamoto |
1997-03-11 |
| 5577552 |
Temperature controlling device for mask and wafer holders |
Ryuichi Ebinuma, Takao Kariya, Nobutoshi Mizusawa, Eiji Sakamoto, Shunichi Uzawa |
1996-11-26 |
| 5459573 |
Light quantity controlling apparatus |
Naoto Abe, Isamu Shimoda, Shunichi Uzawa, Noriyuki Nose |
1995-10-17 |
| 5377251 |
Exposure apparatus |
Nobutoshi Mizusawa, Ryuichi Ebinuma, Hiroshi Kurosawa, Takao Kariya, Shumichi Uzawa |
1994-12-27 |
| 5231291 |
Wafer table and exposure apparatus with the same |
Mitsuaki Amemiya, Eiji Sakamoto, Kunitaka Ozawa, Kazunori Iwamoto, Shunichi Uzawa +1 more |
1993-07-27 |
| 5226523 |
Conveying apparatus and method of controlling the same |
Eigo Kawakami, Kunitaka Ozawa, Shunichi Uzawa, Mitsutoshi Kuno, Kazunori Iwamoto +1 more |
1993-07-13 |
| 5182615 |
Exposure apparatus |
Hiroshi Kurosawa, Kunitaka Ozawa, Shunichi Uzawa, Nobutoshi Mizusawa, Shigeyuki Suda +2 more |
1993-01-26 |
| 5172402 |
Exposure apparatus |
Nobutoshi Mizusawa, Ryuichi Ebinuma, Hiroshi Kurosawa, Takao Kariya, Shunichi Uzawa |
1992-12-15 |
| 5157700 |
Exposure apparatus for controlling intensity of exposure radiation |
Hiroshi Kurosawa, Mitsuaki Amemiya, Shigeru Terashima, Isamu Shimoda, Shunichi Uzawa +6 more |
1992-10-20 |
| 5138643 |
Exposure apparatus |
Eiji Sakamoto, Ryuichi Ebinuma, Mitsuaki Amemiya, Shunichi Uzawa |
1992-08-11 |
| 5112133 |
Alignment system |
Hiroshi Kurosawa, Kunitaka Ozawa, Shunichi Uzawa, Ryuichi Ebinuma, Takao Kariya |
1992-05-12 |
| 5063582 |
Liquid cooled X-ray lithographic exposure apparatus |
Tetsuzo Mori, Eiji Sakamoto, Shinichi Hara, Isamu Shimoda, Shunichi Uzawa +1 more |
1991-11-05 |
| 5028797 |
An alignment system for align first and second objects using alignment marks |
Naoto Abe, Shigeyuki Suda, Hirohisa Ohta, Noriyuki Nose |
1991-07-02 |
| 5008703 |
Exposure apparatus and control of the same |
Eigo Kawakami, Kunitaka Ozawa, Isamu Shimoda, Shunichi Uzawa |
1991-04-16 |
| 5001734 |
SOR exposure system |
Yutaka Tanaka, Tetsuzo Mori, Isamu Shimoda, Shunichi Uzawa |
1991-03-19 |
| 4669867 |
Alignment and exposure apparatus |
Kazuyuki Oda, Naoki Ayata |
1987-06-02 |
