Ryuichi Ebinuma — 73 Patents at Canon

Ryuichi Ebinuma has been granted 73 US patents while listed as an inventor at Canon. The first was granted in 1986 and the most recent in November 2006. Ryuichi Ebinuma ranks #26,958 of 4,157,543 US inventors in our database (top 0.65%). Patent records list Ryuichi Ebinuma in Hiratsuka, MO, JP.

Issued Patents All Time

Showing 1–25 of 73 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
7136238	Method of supporting and adjusting optical element in exposure apparatus	—	2006-11-14	$462,000
7113263	Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device	Yuji Sudo	2006-09-26	$345,000
6867848	Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device	Yuji Sudo	2005-03-15	$277,000
6750947	Driving device and exposure apparatus	Hiroyuki Tomita, Makoto Mizuno	2004-06-15	$268,000
6570645	Stage system and stage driving method for use in exposure apparatus	Nobushige Korenaga	2003-05-27	$226,000
6396566	Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation	Makoto Mizuno	2002-05-28	$225,000
6252314	Linear motor and stage system, and scanning exposure apparatus using the same	—	2001-06-26	$191,000
6144504	Projection and exposure apparatus including an optical member and a holding member	Yuji Sudoh, Masao Kosugi	2000-11-07	$165,000
6133982	Exposure apparatus	Mitsuru Inoue, Kazunori Iwamoto, Hideki Nogawa	2000-10-17	$186,000
6040893	Scanning exposure method and apparatus for controlling acceleration and deceleration of a masking device	—	2000-03-21	$283,000
6037680	Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus	Nobushige Korenaga	2000-03-14	$285,000
5975709	Reflecting system	Yutaka Watanabe	1999-11-02	$133,000
5933215	Exposure apparatus and device manufacturing method using the same	Mitsuru Inoue, Kazunori Iwamoto, Eiji Osanai, Hiroaki Takeishi	1999-08-03	$198,000
5930324	Exposure apparatus and device manufacturing method using the same	Shin Matsui, Yuji Chiba, Yutaka Tanaka	1999-07-27	$218,000
5917580	Scan exposure method and apparatus	Tosiya Asano	1999-06-29	$90,000
5841250	Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus	Nobushige Korenage	1998-11-24	$72,000
5822133	Optical structure and device manufacturing method using the same	Makoto Mizuno, Toshinori Minowa	1998-10-13	$57,000
5822389	Alignment apparatus and SOR X-ray exposure apparatus having same	Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Kohji Uda +5 more	1998-10-13	$57,000
5822043	Exposure method and projection exposure apparatus using the same	—	1998-10-13	$57,000
5800949	Mask, method of producing a device using the mask and aligner with the mask	Ryo Edo, Hiroshi Maehara	1998-09-01	$39,000
5796469	Exposure apparatus and device manufacturing method using the same	—	1998-08-18	$79,000
5760802	Recording apparatus and ink cartridge	Nobutoshi Mizusawa, Yuji Chiba	1998-06-02	$32,000
5687947	Mounting method	Kazunori Iwamoto, Shunichi Uzawa, Takao Kariya, Hiroshi Chiba, Shinkichi Ohkawa	1997-11-18	$92,000
5623529	SOR exposure system and mask manufactured thereby	Yutaka Watanabe	1997-04-22	$90,000
5593800	Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus	Hidehiko Fujioka, Noriyuki Nose, Shinichi Hara, Hiroshi Maehara	1997-01-14	$42,000

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Ryuichi Ebinuma — 73 Patents

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