Issued Patents All Time
Showing 25 most recent of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7136238 | Method of supporting and adjusting optical element in exposure apparatus | — | 2006-11-14 |
| 7113263 | Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device | Yuji Sudo | 2006-09-26 |
| 6867848 | Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device | Yuji Sudo | 2005-03-15 |
| 6750947 | Driving device and exposure apparatus | Hiroyuki Tomita, Makoto Mizuno | 2004-06-15 |
| 6570645 | Stage system and stage driving method for use in exposure apparatus | Nobushige Korenaga | 2003-05-27 |
| 6396566 | Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation | Makoto Mizuno | 2002-05-28 |
| 6252314 | Linear motor and stage system, and scanning exposure apparatus using the same | — | 2001-06-26 |
| 6144504 | Projection and exposure apparatus including an optical member and a holding member | Yuji Sudoh, Masao Kosugi | 2000-11-07 |
| 6133982 | Exposure apparatus | Mitsuru Inoue, Kazunori Iwamoto, Hideki Nogawa | 2000-10-17 |
| 6040893 | Scanning exposure method and apparatus for controlling acceleration and deceleration of a masking device | — | 2000-03-21 |
| 6037680 | Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus | Nobushige Korenaga | 2000-03-14 |
| 5975709 | Reflecting system | Yutaka Watanabe | 1999-11-02 |
| 5933215 | Exposure apparatus and device manufacturing method using the same | Mitsuru Inoue, Kazunori Iwamoto, Eiji Osanai, Hiroaki Takeishi | 1999-08-03 |
| 5930324 | Exposure apparatus and device manufacturing method using the same | Shin Matsui, Yuji Chiba, Yutaka Tanaka | 1999-07-27 |
| 5917580 | Scan exposure method and apparatus | Tosiya Asano | 1999-06-29 |
| 5841250 | Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus | Nobushige Korenage | 1998-11-24 |
| 5822133 | Optical structure and device manufacturing method using the same | Makoto Mizuno, Toshinori Minowa | 1998-10-13 |
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Kohji Uda +5 more | 1998-10-13 |
| 5822043 | Exposure method and projection exposure apparatus using the same | — | 1998-10-13 |
| 5800949 | Mask, method of producing a device using the mask and aligner with the mask | Ryo Edo, Hiroshi Maehara | 1998-09-01 |
| 5796469 | Exposure apparatus and device manufacturing method using the same | — | 1998-08-18 |
| 5760802 | Recording apparatus and ink cartridge | Nobutoshi Mizusawa, Yuji Chiba | 1998-06-02 |
| 5687947 | Mounting method | Kazunori Iwamoto, Shunichi Uzawa, Takao Kariya, Hiroshi Chiba, Shinkichi Ohkawa | 1997-11-18 |
| 5623529 | SOR exposure system and mask manufactured thereby | Yutaka Watanabe | 1997-04-22 |
| 5593800 | Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus | Hidehiko Fujioka, Noriyuki Nose, Shinichi Hara, Hiroshi Maehara | 1997-01-14 |