| 7670754 |
Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers |
Masami Yonekawa, Shinichi Hara |
2010-03-02 |
| 7656507 |
Processing unit, exposure apparatus having the processing unit, and protection unit |
— |
2010-02-02 |
| 7319507 |
Apparatus and method for removing contaminant on original, method of manufacturing device, and original |
Masami Yonekawa, Shinichi Hara |
2008-01-15 |
| 7276097 |
Load-lock system, exposure processing system, and device manufacturing method |
— |
2007-10-02 |
| 7236229 |
Load lock chamber, processing system |
— |
2007-06-26 |
| 7024266 |
Substrate processing apparatus, method of controlling substrate, and exposure apparatus |
— |
2006-04-04 |
| 6805748 |
Substrate processing system with load-lock chamber |
— |
2004-10-19 |
| 5800949 |
Mask, method of producing a device using the mask and aligner with the mask |
Ryuichi Ebinuma, Hiroshi Maehara |
1998-09-01 |
| 5225686 |
Positioning method and positioning mechanism for use in exposure apparatus |
— |
1993-07-06 |
