Ryo Edo — 9 Patents at Canon | Patent Leaderboard

Ryo Edo has been granted 9 US patents while listed as an inventor at Canon. The first was granted in 1993 and the most recent in March 2010. Ryo Edo ranks #535,341 of 4,157,543 US inventors in our database (top 12.9%). Patent records list Ryo Edo in Tokyo, JP.

Issued Patents All Time

Showing 1–9 of 9 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
7670754	Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers	Masami Yonekawa, Shinichi Hara	2010-03-02	$362,000
7656507	Processing unit, exposure apparatus having the processing unit, and protection unit	—	2010-02-02	$447,000
7319507	Apparatus and method for removing contaminant on original, method of manufacturing device, and original	Masami Yonekawa, Shinichi Hara	2008-01-15	$605,000
7276097	Load-lock system, exposure processing system, and device manufacturing method	—	2007-10-02	$432,000
7236229	Load lock chamber, processing system	—	2007-06-26	$553,000
7024266	Substrate processing apparatus, method of controlling substrate, and exposure apparatus	—	2006-04-04	$279,000
6805748	Substrate processing system with load-lock chamber	—	2004-10-19	$331,000
5800949	Mask, method of producing a device using the mask and aligner with the mask	Ryuichi Ebinuma, Hiroshi Maehara	1998-09-01	$39,000
5225686	Positioning method and positioning mechanism for use in exposure apparatus	—	1993-07-06	$23,000

Ryo Edo — 9 Patents

Issued Patents All Time

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