Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292368 | Evaluation method, substrate processing apparatus, manufacturing method of substrate processing apparatus and article manufacturing method | Hisanobu Azuma, Toshihiro Ifuku | 2025-05-06 |
| 12157150 | Particle removal method, particle removal apparatus, and method for manufacturing article | Tomohiro Saito, Hisanobu Azuma | 2024-12-03 |
| 11798818 | Container, processing apparatus, particle removing method, and method of manufacturing article | — | 2023-10-24 |
| 11036149 | Imprint apparatus, method of operating the same, and method of manufacturing article | Yoichi Matsuoka, Kiyohito Yamamoto, Hisanobu Azuma, Shigeru Terashima, Toshihiro Maeda +2 more | 2021-06-15 |
| 10889052 | Imprint apparatus, method for manufacturing article, and exposure apparatus | Yoichi Matsuoka | 2021-01-12 |
| 10444646 | Lithography apparatus and method of manufacturing article | — | 2019-10-15 |
| 10228624 | Lithography apparatus and article manufacturing method | — | 2019-03-12 |
| 9213231 | Reflective original, exposure method, and device manufacturing method | Akira Miyake | 2015-12-15 |
| 8814970 | Trapping device that traps particles in vacuum atmosphere | — | 2014-08-26 |
| 7911588 | Exposure apparatus and original | Mitsuru Inoue | 2011-03-22 |
| 7670754 | Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers | Ryo Edo, Shinichi Hara | 2010-03-02 |
| 7319507 | Apparatus and method for removing contaminant on original, method of manufacturing device, and original | Shinichi Hara, Ryo Edo | 2008-01-15 |
| 7193682 | Exposure apparatus and device manufacturing method | — | 2007-03-20 |
| 6741328 | Exposure apparatus and its control method, stage apparatus, and device manufacturing method | Yozo Fukagawa | 2004-05-25 |
| 6433351 | Exposure apparatus and control method for correcting an exposure optical system on the basis of an estimated magnification variation | — | 2002-08-13 |
| 6330052 | Exposure apparatus and its control method, stage apparatus, and device manufacturing method | Yozo Fukagawa | 2001-12-11 |
| 6088082 | Projection aligner and projection aligning method | — | 2000-07-11 |
| 5953106 | Projection optical system, exposure apparatus and semiconductor-device manufacturing method using the system | Yasuyuki Unno, Seiji Orii | 1999-09-14 |
| 5654792 | Projection exposure apparatus which determines the minimum number of shots to optimially expose the substrate surface | — | 1997-08-05 |
| 5184176 | Projection exposure apparatus with an aberration compensation device of a projection lens | Yasuyuki Unno, Seiji Orii | 1993-02-02 |