Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11880132 | Imprint apparatus and method of manufacturing article | Tadao Nakamura, Takamitsu Komaki | 2024-01-23 |
| 11422461 | Imprint apparatus and method of manufacturing article | Tadao Nakamura, Takamitsu Komaki | 2022-08-23 |
| 11366385 | Imprint mold, manufacturing method thereof, and imprint method | Toshiki Ito, Masayuki Nakajima, Yuichiro Oguchi, Naoki Kiyohara | 2022-06-21 |
| 11235495 | Imprint system and article manufacturing meihod | — | 2022-02-01 |
| 11199770 | Imprint apparatus and method of manufacturing an article | — | 2021-12-14 |
| 11036149 | Imprint apparatus, method of operating the same, and method of manufacturing article | Yoichi Matsuoka, Hisanobu Azuma, Shigeru Terashima, Toshihiro Maeda, Masami Yonekawa +2 more | 2021-06-15 |
| 10672673 | Method of performing analysis of pattern defect, imprint apparatus, and article manufacturing method | Norikazu Baba | 2020-06-02 |
| 9386707 | Circuit substrate and method of forming circuit pattern | Takashi Iwade, Shinya Izumida, Kazuyuki Shishino, Shigeru Tohno | 2016-07-05 |
| 7834982 | Substrate holder and exposure apparatus having the same | — | 2010-11-16 |
| 7298482 | Exposure apparatus and aligning method | — | 2007-11-20 |
| 7295287 | Substrate holder and exposure apparatus having the same | — | 2007-11-13 |
| 6952262 | Exposure apparatus and aligning method | — | 2005-10-04 |