Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098913 | Detector that detects relative positions of marks while blocking non-interference light | Yasuyuki Unno, Tooru Kawashima | 2024-09-24 |
| 11880132 | Imprint apparatus and method of manufacturing article | Tadao Nakamura, Kiyohito Yamamoto | 2024-01-23 |
| 11673313 | Imprint apparatus and article manufacturing method | Kenji Yaegashi | 2023-06-13 |
| 11537056 | Measurement apparatus, lithography apparatus, and method of manufacturing article | Tadao Nakamura | 2022-12-27 |
| 11422461 | Imprint apparatus and method of manufacturing article | Tadao Nakamura, Kiyohito Yamamoto | 2022-08-23 |
| 11372342 | Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method | Toshiki Iwai, Tomokazu Taki | 2022-06-28 |
| 11188001 | Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article | Takashi Shibayama | 2021-11-30 |
| 11181363 | Measurement device, imprint apparatus, method for manufacturing product, light amount determination method, and light amount adjustment method | Kenji Yaegashi, Toshiki Iwai | 2021-11-23 |
| 10777440 | Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method | Toshiki Iwai, Yasuyuki Unno, Nozomu Hayashi | 2020-09-15 |
| 10732522 | Imprint apparatus and article manufacturing method | Yoshiyuki Usui, Nozomu Hayashi | 2020-08-04 |
| 10732523 | Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method | — | 2020-08-04 |
| 10545416 | Detection apparatus, lithography apparatus, and method of manufacturing article | Takashi Shibayama | 2020-01-28 |