Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841616 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2023-12-12 |
| 11833737 | Imprint apparatus, method of imprinting, and method of manufacturing article | — | 2023-12-05 |
| 10901324 | Imprint method, imprint apparatus, and article manufacturing method using the same | — | 2021-01-26 |
| 10777440 | Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method | Toshiki Iwai, Takamitsu Komaki, Yasuyuki Unno | 2020-09-15 |
| 10732522 | Imprint apparatus and article manufacturing method | Takamitsu Komaki, Yoshiyuki Usui | 2020-08-04 |
| 9703190 | Imprint method, imprint apparatus, and article manufacturing method | — | 2017-07-11 |
| 9261776 | Imprint apparatus, and method of manufacturing article | — | 2016-02-16 |
| 8885164 | Exposure method, exposure apparatus, and method of manufacturing device | — | 2014-11-11 |
| 8638370 | Apparatus and method of processing substrate containing mark and method of manufacturing device | — | 2014-01-28 |
| 8390809 | Exposure method, exposure apparatus, and method of manufacturing device | — | 2013-03-05 |
| 8369604 | Position detector, position detection method, exposure apparatus, and device manufacturing method | — | 2013-02-05 |
| 7675632 | Exposure apparatus and device manufacturing method | — | 2010-03-09 |
| 7672000 | Position detecting method and apparatus | — | 2010-03-02 |
| 7495780 | Position measurement apparatus, imaging apparatus, exposure apparatus, and Device manufacturing method | — | 2009-02-24 |
| 7453570 | Mark position measuring method and apparatus | Yukihiro Yokota | 2008-11-18 |
| 7310146 | Mark position measuring method and apparatus | Yukihiro Yokota | 2007-12-18 |
| 7145666 | Position detecting method and apparatus | — | 2006-12-05 |
| 7126670 | Position measurement technique | — | 2006-10-24 |
| 6762825 | Focal point position detecting method in semiconductor exposure apparatus | Hiroshi Tanaka | 2004-07-13 |