Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521845 | Lamp device, exposure apparatus, and method of manufacturing article | Hideki Matsumoto, Yasushi Sugiyama, Kohei Suzuki, Shunsuke Ota | 2022-12-06 |
| 7453570 | Mark position measuring method and apparatus | Nozomu Hayashi | 2008-11-18 |
| 7310146 | Mark position measuring method and apparatus | Nozomu Hayashi | 2007-12-18 |
| 6604011 | Reticle chuck in exposure apparatus and semiconductor device manufacturing method using the same | — | 2003-08-05 |