Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326668 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Takahiro Matsumoto, Takafumi Miyaharu, Tooru Kawashima | 2025-06-10 |
| 12098913 | Detector that detects relative positions of marks while blocking non-interference light | Takamitsu Komaki, Tooru Kawashima | 2024-09-24 |
| 10777440 | Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method | Toshiki Iwai, Takamitsu Komaki, Nozomu Hayashi | 2020-09-15 |
| 9360423 | Optical system for a holographic microscope including a spatial filter | Chung-Chieh Yu, Isao Matsubara | 2016-06-07 |
| 9347853 | Method and device of measuring wavefront aberration, method of manufacturing optical system, and recording medium | — | 2016-05-24 |
| 9170171 | Method and device of measuring wavefront aberration, method of manufacturing optical system, and recording medium | — | 2015-10-27 |
| 9116303 | Hologram with cells to control phase in two polarization directions and exposure apparatus | Isao Matsubara, William Dallas, Tom D. Milster | 2015-08-25 |
| 9091614 | Wavefront optical measuring apparatus | Akinori Ohkubo | 2015-07-28 |
| 8896840 | Interferometric method and digital holographic microscope | Isao Matsubara, Chung-Chieh Yu, William Dallas | 2014-11-25 |
| 8531747 | Hologram, hologram data generation method, and exposure apparatus | Isao Matsubara, William Dallas | 2013-09-10 |
| 8432530 | Device, method, and system for measuring image profiles produced by an optical lithography system | — | 2013-04-30 |
| 8314938 | Method and apparatus for measuring surface profile of an object | Akinori Ohkubo | 2012-11-20 |
| 7911709 | Apparatus and method for improving detected resolution and/or intensity of a sampled image | — | 2011-03-22 |
| 7508598 | Apparatus for measuring aerial images produced by an optical lithography system | — | 2009-03-24 |
| 7262920 | Optical element and manufacturing method therefor | Seiji Takeuchi | 2007-08-28 |
| 7102828 | Optical element and manufacturing method thereof | Seiji Takeuchi | 2006-09-05 |
| 6829041 | Projection optical system and projection exposure apparatus having the same | — | 2004-12-07 |
| 6641985 | Method for making element | Ichiro Tanaka | 2003-11-04 |
| 6476869 | Image processing system and method using system characteristic and image information | Masayoshi Sekine, Shigeyuki Suda | 2002-11-05 |
| 6327086 | Optical diffraction device and exposure apparatus | — | 2001-12-04 |
| 6301001 | Optical element manufacturing system, an illumination system, and an exposure apparatus | — | 2001-10-09 |
| 6120950 | Optical element manufacturing method | — | 2000-09-19 |
| 6077631 | Photomask and scanning exposure apparatus and device manufacturing method using same | — | 2000-06-20 |
| 5995285 | Multilevel optical diffraction device with antireflection film and exposure apparatus | — | 1999-11-30 |
| 5953106 | Projection optical system, exposure apparatus and semiconductor-device manufacturing method using the system | Seiji Orii, Masami Yonekawa | 1999-09-14 |