Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5933219 | Projection exposure apparatus and device manufacturing method capable of controlling polarization direction | — | 1999-08-03 |
| 5872617 | Scanning type exposure apparatus and device manufacturing method | — | 1999-02-16 |
| 5805273 | Projection exposure apparatus and microdevice manufacturing method | — | 1998-09-08 |
| 5706077 | Scan type projection exposure apparatus and microdevice manufacturing method using the same | — | 1998-01-06 |
| 5459000 | Image projection method and device manufacturing method using the image projection method | — | 1995-10-17 |
| 5184176 | Projection exposure apparatus with an aberration compensation device of a projection lens | Seiji Orii, Masami Yonekawa | 1993-02-02 |