Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5953106 | Projection optical system, exposure apparatus and semiconductor-device manufacturing method using the system | Yasuyuki Unno, Masami Yonekawa | 1999-09-14 |
| 5184176 | Projection exposure apparatus with an aberration compensation device of a projection lens | Yasuyuki Unno, Masami Yonekawa | 1993-02-02 |
| 4292426 | Process of producing hydroxypropyl cellulose | Yukio Sasagawa, Akinori Ito | 1981-09-29 |