Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429795 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Takahiro Matsumoto, Hironobu Fujishima, Yuichi Fujita | 2025-09-30 |
| 12326668 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Yasuyuki Unno, Takahiro Matsumoto, Tooru Kawashima | 2025-06-10 |
| 12153343 | Imprint method, imprint apparatus, and article manufacturing method | Tatsuya Hayashi | 2024-11-26 |
| 12072638 | Exposure apparatus, exposure method, and method of manufacturing article | Kazuki Ota, Yuki Saito, Masaki Imai | 2024-08-27 |
| 12023850 | Position detection apparatus, imprint apparatus, and article manufacturing method | Tomokazu Taki | 2024-07-02 |
| 11835869 | Exposure apparatus, exposure method, and method of manufacturing article | Kazuki Ota, Yuki Saito, Masaki Imai | 2023-12-05 |
| 11656547 | Imprint apparatus, imprinting method, and product manufacturing method | Naoki Murasato | 2023-05-23 |
| 11204548 | Imprint apparatus, imprinting method, and method for manufacturing article | Kazuhiro Sato | 2021-12-21 |
| 10761316 | Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article | Ken-ichiro Shinoda, Takahiro Matsumoto, Kazuhiro Sato | 2020-09-01 |
| 10754255 | Exposure apparatus and article manufacturing method | — | 2020-08-25 |
| 10642171 | Imprint apparatus, imprint method, and method for producing article | Takahiro Matsumoto, Kenichi Kobayashi, Yosuke Murakami, Tatsuya Hayashi | 2020-05-05 |
| 10634995 | Position detector, position detection method, imprint apparatus, and product manufacturing method | Ken Minoda | 2020-04-28 |
| 10386737 | Imprint apparatus and method for producing article | Ken-ichiro Shinoda, Shunsuke Ota | 2019-08-20 |
| 9595447 | Detection apparatus, imprint apparatus, and method of manufacturing products | Hiroshi Inada, Kazuhiko Mishima | 2017-03-14 |
| 9594315 | Detection apparatus, lithography apparatus and method of manufacturing article | Kazuhiko Mishima | 2017-03-14 |
| 8497978 | Exposure apparatus and method of manufacturing device | — | 2013-07-30 |
| 8253931 | Exposure apparatus and device manufacturing method | — | 2012-08-28 |
| 8013976 | Exposure apparatus, exposure method, and device fabrication method | — | 2011-09-06 |
| 7671967 | Exposure apparatus and exposure method | Takahisa Shiozawa | 2010-03-02 |