Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12023850 | Position detection apparatus, imprint apparatus, and article manufacturing method | Takafumi Miyaharu | 2024-07-02 |
| 11934098 | Detection apparatus, lithography apparatus, and article manufacturing method | Toshiki Iwai | 2024-03-19 |
| 11829083 | Detection apparatus, lithography apparatus, article manufacturing method, and detection method | Toshiki Iwai, Hiroyuki Matsuda | 2023-11-28 |
| 11372342 | Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method | Toshiki Iwai, Takamitsu Komaki | 2022-06-28 |
| 10001702 | Imprinting apparatus, device fabrication method, and imprinting method | Takashi Toshima | 2018-06-19 |