Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226936 | Substrate processing apparatus, substrate processing method, and article manufacturing method | Hiroki Takada, Osamu Yasunobe | 2025-02-18 |
| 11709421 | Imprint apparatus | Tooru Kawashima | 2023-07-25 |
| 11480872 | Imprint apparatus, imprint method, and method for manufacturing article | Tatsuya Hayashi | 2022-10-25 |
| 10859912 | Imprint apparatus, imprint method, and article manufacturing method | Masahiro Tamura | 2020-12-08 |
| 10761316 | Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article | Takafumi Miyaharu, Takahiro Matsumoto, Kazuhiro Sato | 2020-09-01 |
| 10386737 | Imprint apparatus and method for producing article | Shunsuke Ota, Takafumi Miyaharu | 2019-08-20 |
| 9910351 | Imprint apparatus and article manufacturing method | Akiyoshi Suzuki, Mitsuru Hiura | 2018-03-06 |
| 9625837 | Imprint apparatus and method of manufacturing article | — | 2017-04-18 |
| 9616613 | Imprint apparatus including alignment and overlay measurement | Akiyoshi Suzuki, Mitsuru Hiura | 2017-04-11 |
| 9541825 | Imprint apparatus and article manufacturing method | Akiyoshi Suzuki, Mitsuru Hiura | 2017-01-10 |
| 9465308 | Imprint apparatus, imprint method and method of manufacturing an article | Toshiki Iwai | 2016-10-11 |
| 8208126 | Exposure apparatus and device fabrication method | — | 2012-06-26 |
| 7955765 | Adjustment method, exposure method, device manufacturing method, and exposure apparatus | — | 2011-06-07 |
| 7385672 | Exposure apparatus and method | — | 2008-06-10 |
| 7242457 | Exposure apparatus and exposure method, and device manufacturing method using the same | — | 2007-07-10 |
| 7209218 | Exposure apparatus and method for manufacturing device using the exposure apparatus | Tomoaki Kawakami | 2007-04-24 |
| 6674514 | Illumination optical system in exposure apparatus | — | 2004-01-06 |
| 6560044 | Illumination optical system in exposure apparatus | — | 2003-05-06 |