Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339584 | Substrate conveyance method, substrate conveyance apparatus, molding method, and article manufacturing method | — | 2025-06-24 |
| 12228854 | Layer forming system including cover with support pads, a positioning system with the cover and support pads, and a method of loading a plate | Byung-Jin Choi | 2025-02-18 |
| 12226936 | Substrate processing apparatus, substrate processing method, and article manufacturing method | Hiroki Takada, Ken-ichiro Shinoda | 2025-02-18 |
| 11698584 | Conveyance apparatus, lithography apparatus, and article manufacturing method | — | 2023-07-11 |
| 11199773 | Imprint apparatus, imprint method, and article manufacturing method | Toshihiro Maeda | 2021-12-14 |
| 11073769 | Conveyance apparatus, conveyance method, lithography apparatus, lithography system, and article manufacturing method | — | 2021-07-27 |
| 10535548 | Substrate holding apparatus and substrate processing apparatus | — | 2020-01-14 |
| 9081308 | Driving apparatus and exposure apparatus and device fabrication method | — | 2015-07-14 |
| 8363207 | Exposure apparatus, and method of manufacturing device using same | Yuuki Uchida | 2013-01-29 |
| 8035805 | Driving apparatus and exposure apparatus, and device fabrication method | — | 2011-10-11 |