Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10073339 | Imprint apparatus | Kazuki Nakagawa, Yosuke Murakami | 2018-09-11 |
| 9910351 | Imprint apparatus and article manufacturing method | Ken-ichiro Shinoda, Akiyoshi Suzuki | 2018-03-06 |
| 9851634 | Imprint apparatus | Yozo Matsuda, Noriyasu Hasegawa, Tatsuya Hayashi | 2017-12-26 |
| 9616613 | Imprint apparatus including alignment and overlay measurement | Akiyoshi Suzuki, Ken-ichiro Shinoda | 2017-04-11 |
| 9541825 | Imprint apparatus and article manufacturing method | Ken-ichiro Shinoda, Akiyoshi Suzuki | 2017-01-10 |
| 9442370 | Imprinting method, imprinting apparatus, and device manufacturing method | Hiroshi Sato | 2016-09-13 |
| 7295285 | Exposure apparatus and device manufacturing method | — | 2007-11-13 |
| 7274435 | Exposure apparatus and device fabrication method using the same | Toshihiko Tsuji | 2007-09-25 |
| 6891175 | Exposure apparatus and device manufacturing method using the same | — | 2005-05-10 |
| 5500528 | Scanning electron microscope | Hidenobu Matsui | 1996-03-19 |