Issued Patents All Time
Showing 1–25 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9332166 | Imaging apparatus equipped with illumination optical system having a plurality of optical integrators that guide light | Tomoaki Kawakami | 2016-05-03 |
| 9329376 | Imaging apparatus | Yoshinari Higaki, Miyoko Kawashima | 2016-05-03 |
| 8891062 | Illumination optical system, exposure apparatus, and method of manufacturing device | — | 2014-11-18 |
| 8284378 | Illumination optical system and exposure apparatus | Kazuhiko Kajiyama | 2012-10-09 |
| 8035668 | Exposure apparatus and device manufacturing method | Mitsuro Sugita, Kazuaki Ohmi, Takao Yonehara, Takaaki Terashi, Tohru Kohda +1 more | 2011-10-11 |
| 7714987 | Exposure apparatus | Kazuhiko Kajiyama | 2010-05-11 |
| 7538856 | Illumination optical system and exposure apparatus including the same | Kazuhiko Kajiyama | 2009-05-26 |
| 7324187 | Illumination system and exposure apparatus | Akira Yabuki | 2008-01-29 |
| 7274435 | Exposure apparatus and device fabrication method using the same | Mitsuru Hiura | 2007-09-25 |
| 7265816 | Illumination optical system, exposure apparatus, and device manufacturing method with modified illumination generator | — | 2007-09-04 |
| 7239375 | Illumination apparatus, exposure apparatus and device manufacturing method | — | 2007-07-03 |
| 7130025 | Illumination apparatus, exposure apparatus and device manufacturing method | — | 2006-10-31 |
| 7116396 | Exposure device, exposure method and device manufacturing method | Takaaki Kimura, Yoshitomo Nagahashi | 2006-10-03 |
| 7110084 | Illumination optical system and exposure apparatus | — | 2006-09-19 |
| 7106414 | Exposure system and method for manufacturing device | Yoshitomo Nagahashi, Manabu Fujii, Hironori Murakami | 2006-09-12 |
| 7064806 | Illumination optical system and exposure apparatus | — | 2006-06-20 |
| 7050154 | Illumination optical system in exposure apparatus | — | 2006-05-23 |
| 6946666 | Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same | Kenji Saito, Mitsuro Sugita | 2005-09-20 |
| 6922910 | Exposure apparatus | Yoshitomo Nagahashi, Takaaki Kimura, Shinichi Takagi | 2005-08-02 |
| 6919951 | Illumination system, projection exposure apparatus and device manufacturing method | — | 2005-07-19 |
| 6903799 | Exposure method and exposure apparatus | Takaaki Kimura | 2005-06-07 |
| 6885432 | Projection exposure apparatus and device manufacturing method | — | 2005-04-26 |
| 6856392 | Optical element with alignment mark, and optical system having such optical element | — | 2005-02-15 |
| 6850327 | Inspection method and apparatus for projection optical systems | Tetsuo Taniguchi | 2005-02-01 |
| 6816234 | Illumination optical system in exposure apparatus | — | 2004-11-09 |