Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035668 | Exposure apparatus and device manufacturing method | Mitsuro Sugita, Takao Yonehara, Toshihiko Tsuji, Takaaki Terashi, Tohru Kohda +1 more | 2011-10-11 |
| 7579257 | Sample separating apparatus and method, and substrate manufacturing method | Kazutaka Yanagita, Kiyofumi Sakaguchi | 2009-08-25 |
| 7077901 | Process for producing single crystal silicon wafers | Katsumi Nakagawa, Takao Yonehara, Shoji Nishida | 2006-07-18 |
| 6979629 | Method and apparatus for processing composite member | Kazutaka Yanagita, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2005-12-27 |
| 6971432 | Sample processing system | Kazutaka Yanagita, Kiyofumi Sakaguchi | 2005-12-06 |
| 6900114 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita, Hirokazu Kurisu | 2005-05-31 |
| 6746559 | Method and apparatus for separating composite member using fluid | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2004-06-08 |
| 6672358 | Sample processing system | Kazutaka Yanagita, Kiyofumi Sakaguchi | 2004-01-06 |
| 6656271 | Method of manufacturing semiconductor wafer method of using and utilizing the same | Takao Yonehara, Kunio Watanabe, Tetsuya Shimada, Kiyofumi Sakaguchi | 2003-12-02 |
| 6653205 | Composite member separating method, thin film manufacturing method, and composite member separating apparatus | Kazutaka Yanagita, Kiyofumi Sakaguchi | 2003-11-25 |
| 6653206 | Method and apparatus for processing composite member | Kazutaka Yanagita, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2003-11-25 |
| 6629539 | Sample processing system | Kazutaka Yanagita, Kiyofumi Sakaguchi | 2003-10-07 |
| 6624047 | Substrate and method of manufacturing the same | Kiyofumi Sakaguchi, Kazutaka Yanagita | 2003-09-23 |
| 6609446 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita, Hirokazu Kurisu | 2003-08-26 |
| 6605518 | Method of separating composite member and process for producing thin film | Katsumi Nakagawa, Nobuhiko Sato, Kiyofumi Sakaguchi, Kazutaka Yanagita, Takao Yonehara | 2003-08-12 |
| 6597039 | Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof | Kiyofumi Sakaguchi, Kazutaka Yanagita | 2003-07-22 |
| 6527031 | Sample separating apparatus and method, and substrate manufacturing method | Kazutaka Yanagita, Kiyofumi Sakaguchi | 2003-03-04 |
| 6475323 | Method and apparatus for separating composite member using fluid | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-11-05 |
| 6468923 | Method of producing semiconductor member | Takao Yonehara, Kunio Watanabe, Tetsuya Shimada, Kiyofumi Sakaguchi | 2002-10-22 |
| 6426270 | Substrate processing method and method of manufacturing semiconductor substrate | Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-07-30 |
| 6391743 | Method and apparatus for producing photoelectric conversion device | Masaaki Iwane, Takao Yonehara, Shoji Nishida, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-05-21 |
| 6382292 | Method and apparatus for separating composite member using fluid | Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-05-07 |
| 6376332 | Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method | Kazutaka Yanagita, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2002-04-23 |
| 6342433 | Composite member its separation method and preparation method of semiconductor substrate by utilization thereof | Kiyofumi Sakaguchi, Kazutaka Yanagita | 2002-01-29 |
| 6140209 | Process for forming an SOI substrate | Masaaki Iwane, Takao Yonehara | 2000-10-31 |