Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979629 | Method and apparatus for processing composite member | Kazutaka Yanagita, Kazuaki Ohmi, Kiyofumi Sakaguchi | 2005-12-27 |
| 6900114 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2005-05-31 |
| 6653206 | Method and apparatus for processing composite member | Kazutaka Yanagita, Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-11-25 |
| 6609446 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2003-08-26 |
| 6376332 | Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method | Kazutaka Yanagita, Kazuaki Ohmi, Kiyofumi Sakaguchi | 2002-04-23 |