Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035668 | Exposure apparatus and device manufacturing method | Mitsuro Sugita, Kazuaki Ohmi, Takao Yonehara, Toshihiko Tsuji, Tohru Kohda +1 more | 2011-10-11 |
| 7623219 | Exposure apparatus, exposure method, device manufacturing method | — | 2009-11-24 |
| 6934009 | Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method | — | 2005-08-23 |