Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7760330 | Illumination optical system and exposure apparatus | Yoshio Goto | 2010-07-20 |
| 7671967 | Exposure apparatus and exposure method | Takafumi Miyaharu | 2010-03-02 |
| 7468781 | Exposure apparatus | — | 2008-12-23 |
| 7345741 | Illumination optical system and exposure apparatus | Yoshio Goto | 2008-03-18 |
| 7286206 | Exposure apparatus | — | 2007-10-23 |
| 7142283 | Exposure apparatus | — | 2006-11-28 |
| 6897944 | Illumination optical system, exposure method and apparatus using the same | — | 2005-05-24 |
| 6757050 | Exposure method and apparatus for detecting an exposure amount and for calculating a correction value based on the detected exposure amount | — | 2004-06-29 |
| 6636295 | Exposure apparatus and device manufacturing method | — | 2003-10-21 |
| 5892573 | Exposure apparatus and method with multiple light receiving means | Kazuhiro Takahashi | 1999-04-06 |
| 5726740 | Projection exposure apparatus having illumination device with ring-like or spot-like light source | Masato Muraki, Hiroyuki Ishii, Shigeru Hayata | 1998-03-10 |
| 5719617 | Illumination system for superposing light beams one upon another on a surface using a projecting system having different focal point positions | Kazuhiro Takahashi | 1998-02-17 |
| 5699148 | Exposure apparatus and microdevice manufacturing method using the same | — | 1997-12-16 |
| 5684567 | Exposure apparatus and device manufacturing method for projecting light from a secondary light source onto a mask or pattern | — | 1997-11-04 |
| 5621499 | Scanning exposure apparatus | — | 1997-04-15 |
| 5491534 | Exposure apparatus and microdevice manufacturing method using the same | — | 1996-02-13 |
| 5475491 | Exposure apparatus | — | 1995-12-12 |
| 5459547 | Illumination device | — | 1995-10-17 |
| 5345292 | Illumination device for projection exposure apparatus | Masato Muraki, Hiroyuki Ishii, Shigeru Hayata | 1994-09-06 |
| 5140366 | Exposure apparatus with a function for controlling alignment by use of latent images | Tsuneo Kanda, Akiyoshi Suzuki | 1992-08-18 |
| 5121160 | Exposure method and apparatus | Naoto Sano, Masato Aketagawa, Hitoshi Nakano | 1992-06-09 |
| 4974919 | Illuminating device | Masato Muraki, Masato Aketagawa | 1990-12-04 |