Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9866361 | Radio communication device, oscillation circuit, and sensitivity suppression reduction method | — | 2018-01-09 |
| 7403397 | Switching power-supply module | Tadahiko Matsumoto, Syuichi Honda, Yasuo Ohashi | 2008-07-22 |
| 7145925 | Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Yoshiyuki Nagai | 2006-12-05 |
| 7031364 | Gas laser device and exposure apparatus using the same | Yoshiyuki Nagai | 2006-04-18 |
| 6870865 | Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Yoshiyuki Nagai | 2005-03-22 |
| 6795167 | Projection exposure apparatus and device manufacturing method using the same | Masakatsu Ota | 2004-09-21 |
| 6727976 | Exposure apparatus with a pulsed laser | — | 2004-04-27 |
| 6646717 | Projection exposure apparatus and device manufacturing method using the same | Masakatsu Ota | 2003-11-11 |
| 6625031 | Module part and electronic device | Yasuyuki Morishima | 2003-09-23 |
| 6538492 | Power supply, electronic device using the same, and output | Shingo Kunii | 2003-03-25 |
| 6486567 | Multi-output DC-DC converter and electronic apparatus using the same | Shingo Kunii | 2002-11-26 |
| 6437546 | DC-to-DC converter and electronic device using the same | Shingo Kunii | 2002-08-20 |
| 6434027 | Switching power supply having a plurality of output voltages and minimal number of terminals | Shingo Kunii, Yasuyuki Morishima | 2002-08-13 |
| 6348357 | Exposure apparatus with a pulsed laser | — | 2002-02-19 |
| 6322220 | Exposure apparatus and device manufacturing method using the same | Chidane Ouchi | 2001-11-27 |
| 6215806 | Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface | Tadahiro Ohmi, Yasuyuki Shirai | 2001-04-10 |
| 5969799 | Exposure apparatus with a pulsed laser | — | 1999-10-19 |
| 5949468 | Light quantity measuring system and exposure apparatus using the same | Tsutomu Asahina | 1999-09-07 |
| 5923693 | Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper | Tadahiro Ohmi, Yasuyuki Shirai | 1999-07-13 |
| 5846678 | Exposure apparatus and device manufacturing method | Hidetoshi Nishigori | 1998-12-08 |
| 5661547 | Exposure method and apparatus and device produced thereby in which a stop includes an opening which is variable to substantially compensate for a change in bandwidth of a laser beam | Masato Aketagawa | 1997-08-26 |
| 5597670 | Exposure method and apparatus | Masato Aketagawa | 1997-01-28 |
| 5567928 | Scanning exposure apparatus and method including controlling irradiation timing of an irradiation beam with respect to relative movement between the beam and a substrate | — | 1996-10-22 |
| 5250797 | Exposure method and apparatus for controlling light pulse emission using determined exposure quantities and control parameters | Tsutomu Asahina | 1993-10-05 |
| 5121160 | Exposure method and apparatus | Masato Aketagawa, Hitoshi Nakano, Takahisa Shiozawa | 1992-06-09 |