Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5661547 | Exposure method and apparatus and device produced thereby in which a stop includes an opening which is variable to substantially compensate for a change in bandwidth of a laser beam | Naoto Sano | 1997-08-26 |
| 5597670 | Exposure method and apparatus | Naoto Sano | 1997-01-28 |
| 5121160 | Exposure method and apparatus | Naoto Sano, Hitoshi Nakano, Takahisa Shiozawa | 1992-06-09 |
| 5095190 | Exposure apparatus | Shinji Utamura | 1992-03-10 |
| 4974919 | Illuminating device | Masato Muraki, Takahisa Shiozawa | 1990-12-04 |
| 4968868 | Projection exposure system | — | 1990-11-06 |
| 4905041 | Exposure apparatus | — | 1990-02-27 |