Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7225041 | Information providing method and system | Ichiro Kano, Kaoru Mizushiri, Masahiro Ohtake, Hideki Ina, Nobuaki Ogushi +2 more | 2007-05-29 |
| 6980872 | Information providing method and system | Ichiro Kano, Kaoru Mizushiri, Masahiro Ohtake, Hideki Ina, Nobuaki Ogushi +2 more | 2005-12-27 |
| 5925887 | Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same | Fumio Sakai, Kazuhito Outsuka, Yuichi Yamada, Kazuhiro Takahashi, Yasuo Hasegawa +1 more | 1999-07-20 |
| 5710624 | Aligner and contamination detecting method | — | 1998-01-20 |
| 5095190 | Exposure apparatus | Masato Aketagawa | 1992-03-10 |
| 4881100 | Alignment method | Akiya Nakai, Bunei Hamasaki | 1989-11-14 |
| 4811059 | Alignment method | Bunei Hamasaki, Akiya Nakai | 1989-03-07 |