Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7805279 | Remote maintenance system | Hirohisa Ohta, Yoshito Yoneyama, Masaya Ogura | 2010-09-28 |
| 7225041 | Information providing method and system | Ichiro Kano, Kaoru Mizushiri, Masahiro Ohtake, Hideki Ina, Shinji Utamura +2 more | 2007-05-29 |
| 7062343 | Remote maintenance system | Hirohisa Ohta, Yoshito Yoneyama, Masaya Ogura | 2006-06-13 |
| 6980872 | Information providing method and system | Ichiro Kano, Kaoru Mizushiri, Masahiro Ohtake, Hideki Ina, Shinji Utamura +2 more | 2005-12-27 |
| 6963786 | Remote maintenance system | Hirohisa Ohta, Yoshito Yoneyama, Masaya Ogura | 2005-11-08 |
| 6957112 | Industrial machine management system and method | Hideki Ina, Masaya Ogura | 2005-10-18 |
| 6897456 | Differential pumping system and exposure apparatus | Takayuki Hasegawa, Akira Miyake | 2005-05-24 |
| 6892109 | Remote maintenance system | Hirohisa Ohta, Yoshito Yoneyama, Masaya Ogura | 2005-05-10 |
| 6867843 | Debris removing system for use in X-ray light source | Yutaka Watanabe, Akira Miyake | 2005-03-15 |
| 6795161 | Exposure apparatus, method of manufacturing semiconductor devices and plant therefor | Masaya Ogura, Eiichi Murakami | 2004-09-21 |
| 6665371 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Hideyuki Chinju, Yutaka Watanabe, Akira Miyake | 2003-12-16 |
| 6385497 | Remote maintenance system | Hirohisa Ohta, Yoshito Yoneyama, Masaya Ogura | 2002-05-07 |
| 6160865 | X-ray exposure apparatus with synchrotron radiation intensity measurement | — | 2000-12-12 |
| 6009144 | X-ray system and X-ray exposure apparatus | Takayuki Hasegawa | 1999-12-28 |
| 5760878 | Exposure apparatus and alignment discrimination method | — | 1998-06-02 |
| 5596618 | Exposure apparatus and device manufacturing method using the same | — | 1997-01-21 |