Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6847696 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Yutaka Watanabe, Akira Miyake, Nobuaki Oqushi | 2005-01-25 |
| 6665371 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Yutaka Watanabe, Akira Miyake, Nobuaki Ogushi | 2003-12-16 |
| 5760561 | Method of controlling a stage and a system such as an exposing apparatus using the same | Kunitaka Ozawa, Hirohisa Ohta | 1998-06-02 |