Issued Patents All Time
Showing 25 most recent of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9057966 | Information processing apparatus, information processing method, and memory medium | Daisuke Itai, Yoshihiro Kawauchi | 2015-06-16 |
| 8516145 | Information processing method and information processing apparatus for transmitting data generated by device manufacturing apparatus | Daisuke Itai, Hiroaki Fujiwara, Mitsuhiro Masuda | 2013-08-20 |
| 8373147 | Exposure apparatus and device manufacturing method | Daisuke Itai | 2013-02-12 |
| 8065270 | Information processing system, information processing method, and memory medium | Daisuke Itai, Hiroaki Fujiwara, Yoshihiro Kawauchi, Hisao Nakagawa, Hajime Nakamura +1 more | 2011-11-22 |
| 8060472 | Information processing system, information processing method, and computer-readable storage medium | Daisuke Itai, Hiroaki Fujiwara, Yoshihiro Kawauchi, Hisao Nakagawa, Hajime Nakamura +1 more | 2011-11-15 |
| 6424405 | Exposure apparatus and device manufacturing method | Hiroshi Kurosawa, Noriyasu Hasegawa, Keiji Yoshimura | 2002-07-23 |
| 6204911 | Exposure apparatus and device manufacturing method | Hiroshi Kurosawa, Noriyasu Hasegawa, Keiji Yoshimura | 2001-03-20 |
| 6081319 | Illumination system and scan type exposure apparatus | Eiji Sakamoto, Kazuhiro Takahashi, Youzou Fukagawa | 2000-06-27 |
| 6018395 | Alignment system | Makiko Mori, Shunichi Uzawa, Hirohisa Ohta, Noriyuki Nose | 2000-01-25 |
| 5964540 | Printer apparatus | Tadashi Shiina, Tetsuo Suzuki, Tetsuzo Mori, Katsunori Hatanaka, Masakazu Ozawa | 1999-10-12 |
| 5914773 | Exposure apparatus and method using pulsed light and changing means to control both the light intensity and light emission timing | Hiroshi Kurosawa, Noriyasu Hasegawa, Keiji Yoshimura | 1999-06-22 |
| 5898477 | Exposure apparatus and method of manufacturing a device using the same | Keiji Yoshimura, Hiroshi Kurosawa, Noriyasu Hasegawa | 1999-04-27 |
| 5883701 | Scanning projection exposure method and apparatus | Noriyasu Hasegawa, Hiroshi Kurosawa, Keiji Yoshimura | 1999-03-16 |
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1998-10-13 |
| 5760561 | Method of controlling a stage and a system such as an exposing apparatus using the same | Hideyuki Chinju, Hirohisa Ohta | 1998-06-02 |
| 5757838 | Output control method for excimer laser | Noriyasu Hasegawa, Hiroshi Kurosawa, Keiji Yoshimura | 1998-05-26 |
| 5721959 | Information processing apparatus for pattern editing using logic relationship representative patterns | Takashi Nakamura, Tsuneaki Kadosawa, Tomoaki Kawai, Eiji Koga, Satoshi Ogiwara | 1998-02-24 |
| 5610965 | Exposure method | Makiko Mori, Koji Uda, Isamu Shimoda, Shunichi Uzawa, Eiji Sakamoto | 1997-03-11 |
| 5581590 | SOR exposure system and method of manufacturing semiconductor devices using same | Makiko Mori, Mitsuaki Amemiya | 1996-12-03 |
| 5579495 | Information processing in which a simulation of parallelism is achieved | Tsuneaki Kadosawa, Takashi Nakamura, Eiji Koga, Hitoshi Watanabe | 1996-11-26 |
| 5566922 | Gate valve device | Yutaka Tanaka, Takao Kariya, Shunichi Uzawa | 1996-10-22 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1996-06-04 |
| 5498501 | Exposure method | Isamu Shimoda, Takao Kariya, Nobutoshi Mizusawa, Shunichi Uzawa | 1996-03-12 |
| 5495336 | Position detecting method for detecting a positional relationship between a first object and a second object | Noriyuki Nose, Masanobu Hasegawa | 1996-02-27 |
| 5455616 | Recorder having a paper stacker that inhibits inadvertent movement of papers stacked therein | Masakazu Ozawa, Katsunori Hatanaka, Tetsuo Suzuki, Tetsuzo Mori, Tadashi Shiina +1 more | 1995-10-03 |