Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Nobutoshi Mizusawa, Ryuichi Ebinuma, Kohji Uda +5 more | 1998-10-13 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Nobutoshi Mizusawa, Ryuichi Ebinuma, Kohji Uda +5 more | 1996-06-04 |
| 5114234 | Stage positioning control method and apparatus | Hiroyuki Otsuka, Kotaro Hosaka | 1992-05-19 |
| 4993696 | Movable stage mechanism | Motomu Furukawa, Masaru Ohtsuka, Hironori Yamamoto, Shinkichi Ohkawa, Koichi Matsushita +4 more | 1991-02-19 |
| 4888536 | Device for controlling positioning of an object | Toshikazu Sakai | 1989-12-19 |
| 4810941 | Control system for a servomotor | Shinji Ohishi | 1989-03-07 |
| 4744675 | Moving mechanism | Shigeo Sakino, Mahito Negishi, Koichi Matsushita, Michio Horikoshi | 1988-05-17 |
| 4716731 | Actuator of shape memory effect material | Toshikazu Sakai | 1988-01-05 |
| 4710865 | Control system for positioning an object using switching from a speed control mode to a position control mode with adjustable brain | — | 1987-12-01 |