Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5218896 | Driving mechanism with gas bearing | — | 1993-06-15 |
| 4993696 | Movable stage mechanism | Makoto Higomura, Masaru Ohtsuka, Hironori Yamamoto, Shinkichi Ohkawa, Koichi Matsushita +4 more | 1991-02-19 |
| 4749283 | Static pressure bearing | Takao Yokomatsu | 1988-06-07 |