| 5822389 |
Alignment apparatus and SOR X-ray exposure apparatus having same |
Shunichi Uzawa, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma, Kohji Uda +5 more |
1998-10-13 |
| 5687947 |
Mounting method |
Kazunori Iwamoto, Shunichi Uzawa, Ryuichi Ebinuma, Hiroshi Chiba, Shinkichi Ohkawa |
1997-11-18 |
| 5641264 |
Substrate conveying device and method of controlling the same |
Mitsutoshi Kuno, Hidehiko Fujioka, Nobutoshi Mizusawa, Yuji Chiba, Koji Uda +2 more |
1997-06-24 |
| 5577552 |
Temperature controlling device for mask and wafer holders |
Ryuichi Ebinuma, Nobutoshi Mizusawa, Koji Uda, Eiji Sakamoto, Shunichi Uzawa |
1996-11-26 |
| 5566922 |
Gate valve device |
Yutaka Tanaka, Kunitaka Ozawa, Shunichi Uzawa |
1996-10-22 |
| 5524131 |
Alignment apparatus and SOR x-ray exposure apparatus having same |
Shunichi Uzawa, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma, Kohji Uda +5 more |
1996-06-04 |
| 5498501 |
Exposure method |
Isamu Shimoda, Nobutoshi Mizusawa, Kunitaka Ozawa, Shunichi Uzawa |
1996-03-12 |
| 5390227 |
Exposure apparatus |
Nobutoshi Mizusawa, Ryuichi Ebinuma, Isamu Shimoda, Shunichi Uzawa |
1995-02-14 |
| 5377251 |
Exposure apparatus |
Nobutoshi Mizusawa, Ryuichi Ebinuma, Hiroshi Kurosawa, Koji Uda, Shumichi Uzawa |
1994-12-27 |
| 5356686 |
X-ray mask structure |
Hidehiko Fujioka, Takeshi Miyachi, Yasuaki Fukuda, Yuji Chiba, Nobutoshi Mizusawa +1 more |
1994-10-18 |
| 5317615 |
Exposure apparatus |
Ryuichi Ebinuma, Nobutoshi Mizusawa, Shigeyuki Suda, Shunichi Uzawa, Takayuki Hasegawa |
1994-05-31 |
| 5285488 |
Exposure apparatus |
Yutaka Watanabe, Ryuichi Ebinuma, Nobutoshi Mizusawa, Shunichi Uzawa |
1994-02-08 |
| 5277539 |
Substrate conveying apparatus |
Shin Matsui, Nobutoshi Mizusawa, Ryuichi Ebinuma, Shunichi Uzawa |
1994-01-11 |
| 5267292 |
X-ray exposure apparatus |
Yutaka Tanaka, Nobutoshi Mizusawa, Mitsuaki Amemiya, Isamu Shimoda |
1993-11-30 |
| 5226523 |
Conveying apparatus and method of controlling the same |
Eigo Kawakami, Koji Uda, Kunitaka Ozawa, Shunichi Uzawa, Mitsutoshi Kuno +1 more |
1993-07-13 |
| 5182615 |
Exposure apparatus |
Hiroshi Kurosawa, Koji Uda, Kunitaka Ozawa, Shunichi Uzawa, Nobutoshi Mizusawa +2 more |
1993-01-26 |
| 5172402 |
Exposure apparatus |
Nobutoshi Mizusawa, Ryuichi Ebinuma, Hiroshi Kurosawa, Koji Uda, Shunichi Uzawa |
1992-12-15 |
| 5172403 |
X-ray exposure apparatus |
Yutaka Tanaka, Nobutoshi Mizusawa, Shunichi Uzawa, Mitsuaki Amemiya |
1992-12-15 |
| 5168512 |
Method of manufacture of semiconductor devices |
Kazunori Iwamoto, Nobutoshi Mizusawa, Shunichi Uzawa, Ryuichi Ebinuma |
1992-12-01 |
| 5164974 |
X-ray exposure apparatus |
Yasuo Kawai, Masahiko Okunuki, Susumu Gotoh |
1992-11-17 |
| 5160961 |
Substrate holding device |
Mitsuji Marumo, Kazunori Iwamoto, Nobutoshi Mizusawa, Shunichi Uzawa |
1992-11-03 |
| 5161176 |
Exposure apparatus |
Ryuichi Ebinuma, Kunitaka Ozawa, Shunichi Uzawa, Noriyuki Nose |
1992-11-03 |
| 5153898 |
X-ray reduction projection exposure system of reflection type |
Masayuki Suzuki, Noritaka Mochizuki, Setsuo Minami, Shigetaro Ogura, Yasuaki Fukuda +2 more |
1992-10-06 |
| 5150391 |
Exposure apparatus |
Ryuichi Ebinuma, Nobutoshi Mizusawa, Shigeyuki Suda, Shunichi Uzawa |
1992-09-22 |
| 5131022 |
Exposure method and apparatus |
Shigeru Terashima, Mitsuaki Amemiya, Isamu Shimoda, Shunichi Uzawa |
1992-07-14 |
