Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5128975 | X-ray exposure system | Kazunori Iwamoto, Shunichi Uzawa, Ryuichi Ebinuma | 1992-07-07 |
| 5112133 | Alignment system | Hiroshi Kurosawa, Koji Uda, Kunitaka Ozawa, Shunichi Uzawa, Ryuichi Ebinuma | 1992-05-12 |
| 5066131 | Stage mechanism | Mikio Iwata, Masaru Ohtsuka | 1991-11-19 |
| 5026239 | Mask cassette and mask cassette loading device | Yuji Chiba, Hidehiko Fujioka, Nobutoshi Mizusawa, Isamu Shimoda | 1991-06-25 |
| 4993696 | Movable stage mechanism | Motomu Furukawa, Makoto Higomura, Masaru Ohtsuka, Hironori Yamamoto, Shinkichi Ohkawa +4 more | 1991-02-19 |
| 4963921 | Device for holding a mask | Hidehiko Fujioka | 1990-10-16 |
| 4830498 | Position detecting device | Yoshifumi Nishimoto, Masahiko Okunuki, Yasuo Kawai, Akio Atsuta | 1989-05-16 |
| 4785187 | Alignment device | Susumu Goto, Masahiko Okunuki | 1988-11-15 |
| 4667110 | Apparatus for holding an object by use of electrostatic attracting force | — | 1987-05-19 |