Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6167111 | Exposure apparatus for synchrotron radiation lithography | Yutaka Watanabe, Shunichi Uzawa, Yasuaki Fukuda, Shinichi Hara | 2000-12-26 |
| 5999589 | Substrate holding device and exposing apparatus using the same | Yuji Chiba, Kazunori Iwamoto, Yutaka Tanaka, Shinichi Hara, Mitsuji Marumo +2 more | 1999-12-07 |
| 5883932 | Substrate holding device and exposing apparatus using the same | Yuji Chiba, Kazunori Iwamoto, Yutaka Tanaka, Shinichi Hara, Mitsuji Marumo +2 more | 1999-03-16 |
| 5854819 | Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same | Shinichi Hara, Takeshi Miyachi, Yuji Chiba, Kazuyuki Kasumi | 1998-12-29 |
| 5825463 | Mask and mask supporting mechanism | Shinichi Hara, Yuji Chiba | 1998-10-20 |
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Ryuichi Ebinuma, Kohji Uda +5 more | 1998-10-13 |
| 5760802 | Recording apparatus and ink cartridge | Ryuichi Ebinuma, Yuji Chiba | 1998-06-02 |
| 5641264 | Substrate conveying device and method of controlling the same | Mitsutoshi Kuno, Hidehiko Fujioka, Yuji Chiba, Takao Kariya, Koji Uda +2 more | 1997-06-24 |
| 5577552 | Temperature controlling device for mask and wafer holders | Ryuichi Ebinuma, Takao Kariya, Koji Uda, Eiji Sakamoto, Shunichi Uzawa | 1996-11-26 |
| 5552812 | Recording apparatus having an ink mist evacuation system | Ryuichi Ebinuma, Yuji Chiba | 1996-09-03 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Ryuichi Ebinuma, Kohji Uda +5 more | 1996-06-04 |
| 5498501 | Exposure method | Isamu Shimoda, Takao Kariya, Kunitaka Ozawa, Shunichi Uzawa | 1996-03-12 |
| 5485495 | X-ray mask, and exposure apparatus and device production using the mask | Takeshi Miyachi, Shinichi Hara, Hiroshi Maehara | 1996-01-16 |
| 5467114 | Recording apparatus and ink cartridge | Ryuichi Ebinuma, Yuji Chiba | 1995-11-14 |
| 5390227 | Exposure apparatus | Ryuichi Ebinuma, Takao Kariya, Isamu Shimoda, Shunichi Uzawa | 1995-02-14 |
| 5377251 | Exposure apparatus | Ryuichi Ebinuma, Hiroshi Kurosawa, Koji Uda, Takao Kariya, Shumichi Uzawa | 1994-12-27 |
| 5365561 | Exposure control in an X-ray exposure apparatus | Ryuichi Ebinuma, Masayuki Suzuki, Shinichirou Uno, Tetsuzo Mori, Hiroshi Kurosawa | 1994-11-15 |
| 5356686 | X-ray mask structure | Hidehiko Fujioka, Takeshi Miyachi, Yasuaki Fukuda, Yuji Chiba, Takao Kariya +1 more | 1994-10-18 |
| 5317615 | Exposure apparatus | Ryuichi Ebinuma, Takao Kariya, Shigeyuki Suda, Shunichi Uzawa, Takayuki Hasegawa | 1994-05-31 |
| 5285488 | Exposure apparatus | Yutaka Watanabe, Ryuichi Ebinuma, Shunichi Uzawa, Takao Kariya | 1994-02-08 |
| 5277539 | Substrate conveying apparatus | Shin Matsui, Takao Kariya, Ryuichi Ebinuma, Shunichi Uzawa | 1994-01-11 |
| 5267292 | X-ray exposure apparatus | Yutaka Tanaka, Mitsuaki Amemiya, Takao Kariya, Isamu Shimoda | 1993-11-30 |
| 5182615 | Exposure apparatus | Hiroshi Kurosawa, Koji Uda, Kunitaka Ozawa, Shunichi Uzawa, Shigeyuki Suda +2 more | 1993-01-26 |
| 5172402 | Exposure apparatus | Ryuichi Ebinuma, Hiroshi Kurosawa, Koji Uda, Takao Kariya, Shunichi Uzawa | 1992-12-15 |
| 5172403 | X-ray exposure apparatus | Yutaka Tanaka, Takao Kariya, Shunichi Uzawa, Mitsuaki Amemiya | 1992-12-15 |