Issued Patents All Time
Showing 1–25 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947519 | X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure | Kenji Itoga, Yutaka Watanabe, Toyoki Kitayama | 2005-09-20 |
| 6947518 | X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device | Kenji Itoga, Toyoki Kitayama, Yutaka Watanabe | 2005-09-20 |
| 6645707 | Device manufacturing method | Mitsuaki Amemiya, Keiko Chiba, Yutaka Watanabe | 2003-11-11 |
| 6647087 | Exposure method | Mitsuaki Amemiya | 2003-11-11 |
| 6455203 | Mask structure and method of manufacturing the same | Mitsuaki Amemiya, Keiko Chiba | 2002-09-24 |
| 6327332 | Exposure method | Mitsuaki Amemiya | 2001-12-04 |
| 6324250 | Exposure method | Mitsuaki Amemiya, Yutaka Watanabe | 2001-11-27 |
| 6272202 | Exposure method and X-ray mask structure for use with the same | Keiko Chiba, Mitsuaki Amemiya, Yutaka Watanabe | 2001-08-07 |
| 6167111 | Exposure apparatus for synchrotron radiation lithography | Yutaka Watanabe, Yasuaki Fukuda, Nobutoshi Mizusawa, Shinichi Hara | 2000-12-26 |
| 6018395 | Alignment system | Makiko Mori, Kunitaka Ozawa, Hirohisa Ohta, Noriyuki Nose | 2000-01-25 |
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma, Kohji Uda +5 more | 1998-10-13 |
| 5687947 | Mounting method | Kazunori Iwamoto, Takao Kariya, Ryuichi Ebinuma, Hiroshi Chiba, Shinkichi Ohkawa | 1997-11-18 |
| 5680428 | Process for holding an object | Mitsuaki Amemiya | 1997-10-21 |
| 5641264 | Substrate conveying device and method of controlling the same | Mitsutoshi Kuno, Hidehiko Fujioka, Nobutoshi Mizusawa, Yuji Chiba, Takao Kariya +2 more | 1997-06-24 |
| 5610965 | Exposure method | Makiko Mori, Kunitaka Ozawa, Koji Uda, Isamu Shimoda, Eiji Sakamoto | 1997-03-11 |
| 5577552 | Temperature controlling device for mask and wafer holders | Ryuichi Ebinuma, Takao Kariya, Nobutoshi Mizusawa, Koji Uda, Eiji Sakamoto | 1996-11-26 |
| 5566922 | Gate valve device | Yutaka Tanaka, Kunitaka Ozawa, Takao Kariya | 1996-10-22 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma, Kohji Uda +5 more | 1996-06-04 |
| 5498501 | Exposure method | Isamu Shimoda, Takao Kariya, Nobutoshi Mizusawa, Kunitaka Ozawa | 1996-03-12 |
| 5459573 | Light quantity controlling apparatus | Naoto Abe, Koji Uda, Isamu Shimoda, Noriyuki Nose | 1995-10-17 |
| 5443932 | Exposure method | Hirohisa Ohta, Kunitaka Ozawa, Eigo Kawakami | 1995-08-22 |
| 5390227 | Exposure apparatus | Nobutoshi Mizusawa, Ryuichi Ebinuma, Takao Kariya, Isamu Shimoda | 1995-02-14 |
| 5356686 | X-ray mask structure | Hidehiko Fujioka, Takeshi Miyachi, Yasuaki Fukuda, Yuji Chiba, Nobutoshi Mizusawa +1 more | 1994-10-18 |
| 5329126 | Apparatus and process for vacuum-holding an object | Mitsuaki Amemiya | 1994-07-12 |
| 5323440 | X-ray lithography apparatus including a dose detectable mask | Shinichi Hara, Mitsuaki Amemiya | 1994-06-21 |