Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947518 | X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device | Kenji Itoga, Yutaka Watanabe, Shunichi Uzawa | 2005-09-20 |
| 6947519 | X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure | Kenji Itoga, Shunichi Uzawa, Yutaka Watanabe | 2005-09-20 |
| 6760400 | Exposing method and semiconductor device fabricated by the exposing method | Hiroshi Watanabe, Kouji Kise | 2004-07-06 |
| 6735275 | X-ray exposure method, x-ray exposure apparatus, fine structure and semiconductor device | Kenji Itoga | 2004-05-11 |
| 5036290 | Synchrotron radiation generation apparatus | Tadasi Sonobe, Mamoru Katane, Takashi Ikeguchi, Manabu Matsumoto, Shinjiro Ueda +3 more | 1991-07-30 |