Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500795 | Area light source device and display device using same | Akimasa Yuuki, Kazutada Takaira, Seiji Sakai | 2016-11-22 |
| 8885118 | Illumination device and liquid crystal display having a light guide plate with protrusions of multiple heights | Akimasa Yuuki, Naoko Iwasaki, Takafumi Kokusho, Yuji Tsuchiyama, Seiji Sakai | 2014-11-11 |
| 8348490 | Planar light source device and method of manufacturing divided prism mold | Akimasa Yuuki, Naoko Iwasaki, Suguru Nagae | 2013-01-08 |
| 7197108 | Method of fabricating X-ray mask and method of fabricating semiconductor device using the X-ray mask | Hiroshi Watanabe, Koji Kise | 2007-03-27 |
| 6947518 | X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device | Toyoki Kitayama, Yutaka Watanabe, Shunichi Uzawa | 2005-09-20 |
| 6947519 | X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure | Shunichi Uzawa, Yutaka Watanabe, Toyoki Kitayama | 2005-09-20 |
| 6901133 | X-ray exposure method and semiconductor device manufactured using this X-ray exposure method as well as X-ray mask, X-ray exposure unit and resist material | Hiroshi Watanabe | 2005-05-31 |
| 6770408 | Dust particle inspection method for X-ray mask | Hideki Ina | 2004-08-03 |
| 6735275 | X-ray exposure method, x-ray exposure apparatus, fine structure and semiconductor device | Toyoki Kitayama | 2004-05-11 |
| 6521889 | Dust particle inspection apparatus, and device manufacturing method using the same | Hideki Ina | 2003-02-18 |
| 5155651 | Levitator with rotation control | Shinichi Yoda, Souichiro Okuda, Kazunori Ikegami | 1992-10-13 |